Abstract
Soft magnetic FeTaN and novel FeTaN/AIN multilayer films with a saturation flux density of ∼20 kG are obtained on both planar and sloping substrates. Flat frequency responses extend over 500 MHz for as-deposited 1000 Å-thick FeTaN films. The 3 dB roll-off frequency for as-deposited 1 μm-thick (FeTaN/ AlN)10 laminates is only ∼330 MHz. However, when the laminates are patterned into 20 μm-wide strips along the hard axis, the frequency response improves and the 3 dB roll-off frequency is over 500 MHz, which offers the promise of data rates of over 1 Gb/sec.
Original language | English |
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Pages (from-to) | 2502-2504 |
Number of pages | 3 |
Journal | IEEE Transactions on Magnetics |
Volume | 35 |
Issue number | 5 PART 1 |
DOIs | |
Publication status | Published - 1999 |
Bibliographical note
Funding Information:Manuscript received March 5, 1999. This work is partially supported by NSF Grant ECS-9710223. Shan X. Wang, (650) 723-8671, fax (650) 725-4034, sxwang@ee.stanford.edu.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering