Abstract
LTPS technology based on SLS Crystallization was intensively reviewed. LTPS structure produced by SLS crystallization is composed of much larger grains compared with conventional ELA crystallization structure, which can give higher TFT performances. However, TFT performance uniformity and anisotropy problem should be solved for it to be used in mass production. TFT performance uniformity was from main grain boundary position and could be solved by equal defect area structure (EDAS™). TFT performance anisotropy could be also solved by multi-channel (MC) structure that can make parallel component in perpendicular channel direction. The higher TFT performances from SLS technology can make superior optical and/or electrical properties and has been adopted in mass production successfully.
| Original language | English |
|---|---|
| Pages (from-to) | 1756-1760 |
| Number of pages | 5 |
| Journal | Proceedings of International Meeting on Information Display |
| Volume | 2006 |
| Publication status | Published - 2006 |
| Event | IMID/IDMC 2006: 6th Internaional Meeting on Information Display and the 5th International Display Manufacturing Conference - Daegu, Korea, Republic of Duration: 2006 Aug 22 → 2006 Aug 25 |
All Science Journal Classification (ASJC) codes
- Engineering(all)