Low-voltage and low-power field-ionization gas sensor based on micro-gap between suspended silver nanowires electrodes for toluene detection

Han Il Jung; Soonjae Pyo; Jongbaeg Kim

doi:10.1109/MEMSYS.2017.7863374

Low-voltage and low-power field-ionization gas sensor based on micro-gap between suspended silver nanowires electrodes for toluene detection

Han Il Jung, Soonjae Pyo, Jongbaeg Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

We have demonstrated field-ionization gas sensor using suspended silver nanowires as electrodes. The tight gap of 1.5 μm between two facing sets of suspended in-plane nanowires on top of silicon microelectrodes, as well as the sharp protrusion of nanowires, allows the generation of high and non-uniform electric field. This produces field emission of electrons that result in ionization of gas molecules at a very low voltage applied. The fabricated sensor could detect toluene at 1.5 V of operational voltage, which is 10 times lower than the existing ionization gas sensors. Resultantly, extremely low power consumption of 75 nW for toluene sensing is also achieved, which implies the proposed field-ionization gas sensor could be a strong candidate for mobile device application.

Original language	English
Title of host publication	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	195-198
Number of pages	4
ISBN (Electronic)	9781509050789
DOIs	https://doi.org/10.1109/MEMSYS.2017.7863374
Publication status	Published - 2017 Feb 23
Event	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States Duration: 2017 Jan 22 → 2017 Jan 26

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Country/Territory	United States
City	Las Vegas
Period	17/1/22 → 17/1/26

Bibliographical note

Publisher Copyright:
© 2017 IEEE.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2017.7863374

Cite this

Jung, H. I., Pyo, S., & Kim, J. (2017). Low-voltage and low-power field-ionization gas sensor based on micro-gap between suspended silver nanowires electrodes for toluene detection. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 195-198). [7863374] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863374

Jung, Han Il ; Pyo, Soonjae ; Kim, Jongbaeg. / Low-voltage and low-power field-ionization gas sensor based on micro-gap between suspended silver nanowires electrodes for toluene detection. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 195-198 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "Low-voltage and low-power field-ionization gas sensor based on micro-gap between suspended silver nanowires electrodes for toluene detection",

abstract = "We have demonstrated field-ionization gas sensor using suspended silver nanowires as electrodes. The tight gap of 1.5 μm between two facing sets of suspended in-plane nanowires on top of silicon microelectrodes, as well as the sharp protrusion of nanowires, allows the generation of high and non-uniform electric field. This produces field emission of electrons that result in ionization of gas molecules at a very low voltage applied. The fabricated sensor could detect toluene at 1.5 V of operational voltage, which is 10 times lower than the existing ionization gas sensors. Resultantly, extremely low power consumption of 75 nW for toluene sensing is also achieved, which implies the proposed field-ionization gas sensor could be a strong candidate for mobile device application.",

author = "Jung, {Han Il} and Soonjae Pyo and Jongbaeg Kim",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 ; Conference date: 22-01-2017 Through 26-01-2017",

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Jung, HI, Pyo, S & Kim, J 2017, Low-voltage and low-power field-ionization gas sensor based on micro-gap between suspended silver nanowires electrodes for toluene detection. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863374, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 195-198, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 17/1/22. https://doi.org/10.1109/MEMSYS.2017.7863374

Low-voltage and low-power field-ionization gas sensor based on micro-gap between suspended silver nanowires electrodes for toluene detection. / Jung, Han Il; Pyo, Soonjae; Kim, Jongbaeg.
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 195-198 7863374 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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T1 - Low-voltage and low-power field-ionization gas sensor based on micro-gap between suspended silver nanowires electrodes for toluene detection

AU - Jung, Han Il

AU - Pyo, Soonjae

AU - Kim, Jongbaeg

PY - 2017/2/23

Y1 - 2017/2/23

N2 - We have demonstrated field-ionization gas sensor using suspended silver nanowires as electrodes. The tight gap of 1.5 μm between two facing sets of suspended in-plane nanowires on top of silicon microelectrodes, as well as the sharp protrusion of nanowires, allows the generation of high and non-uniform electric field. This produces field emission of electrons that result in ionization of gas molecules at a very low voltage applied. The fabricated sensor could detect toluene at 1.5 V of operational voltage, which is 10 times lower than the existing ionization gas sensors. Resultantly, extremely low power consumption of 75 nW for toluene sensing is also achieved, which implies the proposed field-ionization gas sensor could be a strong candidate for mobile device application.

AB - We have demonstrated field-ionization gas sensor using suspended silver nanowires as electrodes. The tight gap of 1.5 μm between two facing sets of suspended in-plane nanowires on top of silicon microelectrodes, as well as the sharp protrusion of nanowires, allows the generation of high and non-uniform electric field. This produces field emission of electrons that result in ionization of gas molecules at a very low voltage applied. The fabricated sensor could detect toluene at 1.5 V of operational voltage, which is 10 times lower than the existing ionization gas sensors. Resultantly, extremely low power consumption of 75 nW for toluene sensing is also achieved, which implies the proposed field-ionization gas sensor could be a strong candidate for mobile device application.

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Jung HI, Pyo S, Kim J. Low-voltage and low-power field-ionization gas sensor based on micro-gap between suspended silver nanowires electrodes for toluene detection. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 195-198. 7863374. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2017.7863374

Low-voltage and low-power field-ionization gas sensor based on micro-gap between suspended silver nanowires electrodes for toluene detection

Abstract

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