Abstract
New push-pull configuration using torsion springs and leverage for low-voltage actuated microwave switch is proposed. It is fabricated by surface micromachining and has demonstrated the switch operation up to 4GHz. The actuation voltage is 6V and the isolation has been achieved more than 28dB by the push-pull configuration.
Original language | English |
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Pages (from-to) | 157-160 |
Number of pages | 4 |
Journal | IEEE MTT-S International Microwave Symposium Digest |
Volume | 1 |
Publication status | Published - 2000 |
Event | Proceedings of the 1999 IEEE MTT-S International Microwave Symposium - Boston, MA, USA Duration: 2000 Jun 11 → 2000 Jun 16 |
All Science Journal Classification (ASJC) codes
- Radiation
- Condensed Matter Physics
- Electrical and Electronic Engineering