Low-temperature soluble InZnO thin film transistors by microwave annealing

Keunkyu Song, Young Koo Chang, Taehwan Jun, Daehee Lee, Youngmin Jeong, Jooho Moon

Research output: Contribution to journalArticlepeer-review

44 Citations (Scopus)


Low-temperature solution-deposited thin film transistors (TFTs) involving solgel derived indium zinc oxide (IZO) as active layers is reported. Microwave annealing is shown to afford the fabrication of low-temperature processable TFTs. Solution-processed IZO-TFTs prepared at 150 °C by microwave irradiation have shown enhanced device characteristics of 0.1 cm2 V-1 s-1 mobility and a ∼106 on/off current ratio, a threshold voltage of 8.1, and a subthreshold slope of 3.3 V/decade. From the results of X-ray diffraction (XRD) and high-resolution transmission electron microscopy (HRTEM), we confirmed that the device improvement originates from better crystallization at low temperature made possible by the use of microwave irradiation. Our findings suggest that solution-processable oxide semiconductors have potential for low-temperature and high-performance applications in transparent flexible devices.

Original languageEnglish
Pages (from-to)23-27
Number of pages5
JournalJournal of Crystal Growth
Issue number1
Publication statusPublished - 2011 Jul 1

Bibliographical note

Funding Information:
This work was supported by the Mid-career Researcher Program through an NRF Grant funded by the MEST ( 2009-0086302 ). It was also partially supported by the Second Stage of the Brain Korea 21 Project . In addition, we acknowledge the Pohang Accelerator Laboratory (PAL) for conducting the XRD measurements.

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry


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