Low power micro-gas sensors using mixed SnO2 nanoparticles and MWCNTs to detect NO2, NH3, and xylene gases for ubiquitous sensor network applications

Kwang Yong Choi; Joon Shik Park; Kwang Bum Park; Hyun Jae Kim; Hyo Derk Park; Seong Dong Kim

doi:10.1016/j.snb.2010.07.041

Low power micro-gas sensors using mixed SnO₂ nanoparticles and MWCNTs to detect NO₂, NH₃, and xylene gases for ubiquitous sensor network applications

Kwang Yong Choi, Joon Shik Park, Kwang Bum Park, Hyun Jae Kim, Hyo Derk Park, Seong Dong Kim

Department of Electrical and Electronic Engineering

Research output: Contribution to journal › Article › peer-review

75 Citations (Scopus)

Abstract

Using mixed SnO₂ nanoparticles with 1 wt.% MWCNTs sensing materials, NO₂, NH₃, and xylene gas sensors were fabricated on micro-platforms. A micro-platform consists of micro-sensing electrode and micro-heater on 2 μm thick SiN_x membrane. The fabricated gas sensors were characterized to NO₂, NH₃, and xylene gases, respectively, as a function of concentration at 300 °C and temperature from 180 °C to 380 °C at constant concentration. The measured highest sensitivities for the NO₂, NH₃, and xylene were 1.06 at 1.2 ppm and 220 °C, 0.19 at 60 ppm, and 220 °C, and 0.15 at 3.6 ppm and 220 °C, respectively. So, it was found that 220 °C was the optimum temperature to have the best sensitivities. From these results, mixed SnO₂ nanoparticles with 1 wt.% MWCNTs showed good sensitivity and selectivity at low power operation below 30 mW. Fabricated micro-gas sensors could be used for ubiquitous sensor network applications to monitor environmental pollutants in the air.

Original language	English
Pages (from-to)	65-72
Number of pages	8
Journal	Sensors and Actuators, B: Chemical
Volume	150
Issue number	1
DOIs	https://doi.org/10.1016/j.snb.2010.07.041
Publication status	Published - 2010 Oct 21

Bibliographical note

Funding Information:
This work was supported by the IT R&D Program of Ministry of Knowledge Economy/Institute for Information Technology Advancement (MKE/IITA) [2006-S-078-04, Environmental Sensing and Alerting System with Nano-Wire and Nano-Tube]. We acknowledge the Korean Government for its financial support.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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10.1016/j.snb.2010.07.041

Cite this

@article{ab1ca5a63f62464b8b5caedd2778abb4,

title = "Low power micro-gas sensors using mixed SnO2 nanoparticles and MWCNTs to detect NO2, NH3, and xylene gases for ubiquitous sensor network applications",

abstract = "Using mixed SnO2 nanoparticles with 1 wt.% MWCNTs sensing materials, NO2, NH3, and xylene gas sensors were fabricated on micro-platforms. A micro-platform consists of micro-sensing electrode and micro-heater on 2 μm thick SiNx membrane. The fabricated gas sensors were characterized to NO2, NH3, and xylene gases, respectively, as a function of concentration at 300 °C and temperature from 180 °C to 380 °C at constant concentration. The measured highest sensitivities for the NO2, NH3, and xylene were 1.06 at 1.2 ppm and 220 °C, 0.19 at 60 ppm, and 220 °C, and 0.15 at 3.6 ppm and 220 °C, respectively. So, it was found that 220 °C was the optimum temperature to have the best sensitivities. From these results, mixed SnO2 nanoparticles with 1 wt.% MWCNTs showed good sensitivity and selectivity at low power operation below 30 mW. Fabricated micro-gas sensors could be used for ubiquitous sensor network applications to monitor environmental pollutants in the air.",

author = "Choi, {Kwang Yong} and Park, {Joon Shik} and Park, {Kwang Bum} and Kim, {Hyun Jae} and Park, {Hyo Derk} and Kim, {Seong Dong}",

note = "Funding Information: This work was supported by the IT R&D Program of Ministry of Knowledge Economy/Institute for Information Technology Advancement (MKE/IITA) [2006-S-078-04, Environmental Sensing and Alerting System with Nano-Wire and Nano-Tube]. We acknowledge the Korean Government for its financial support. ",

year = "2010",

month = oct,

day = "21",

doi = "10.1016/j.snb.2010.07.041",

language = "English",

volume = "150",

pages = "65--72",

journal = "Sensors and Actuators, B: Chemical",

issn = "0925-4005",

publisher = "Elsevier",

number = "1",

}

TY - JOUR

T1 - Low power micro-gas sensors using mixed SnO2 nanoparticles and MWCNTs to detect NO2, NH3, and xylene gases for ubiquitous sensor network applications

AU - Choi, Kwang Yong

AU - Park, Joon Shik

AU - Park, Kwang Bum

AU - Kim, Hyun Jae

AU - Park, Hyo Derk

AU - Kim, Seong Dong

N1 - Funding Information: This work was supported by the IT R&D Program of Ministry of Knowledge Economy/Institute for Information Technology Advancement (MKE/IITA) [2006-S-078-04, Environmental Sensing and Alerting System with Nano-Wire and Nano-Tube]. We acknowledge the Korean Government for its financial support.

PY - 2010/10/21

Y1 - 2010/10/21

N2 - Using mixed SnO2 nanoparticles with 1 wt.% MWCNTs sensing materials, NO2, NH3, and xylene gas sensors were fabricated on micro-platforms. A micro-platform consists of micro-sensing electrode and micro-heater on 2 μm thick SiNx membrane. The fabricated gas sensors were characterized to NO2, NH3, and xylene gases, respectively, as a function of concentration at 300 °C and temperature from 180 °C to 380 °C at constant concentration. The measured highest sensitivities for the NO2, NH3, and xylene were 1.06 at 1.2 ppm and 220 °C, 0.19 at 60 ppm, and 220 °C, and 0.15 at 3.6 ppm and 220 °C, respectively. So, it was found that 220 °C was the optimum temperature to have the best sensitivities. From these results, mixed SnO2 nanoparticles with 1 wt.% MWCNTs showed good sensitivity and selectivity at low power operation below 30 mW. Fabricated micro-gas sensors could be used for ubiquitous sensor network applications to monitor environmental pollutants in the air.

AB - Using mixed SnO2 nanoparticles with 1 wt.% MWCNTs sensing materials, NO2, NH3, and xylene gas sensors were fabricated on micro-platforms. A micro-platform consists of micro-sensing electrode and micro-heater on 2 μm thick SiNx membrane. The fabricated gas sensors were characterized to NO2, NH3, and xylene gases, respectively, as a function of concentration at 300 °C and temperature from 180 °C to 380 °C at constant concentration. The measured highest sensitivities for the NO2, NH3, and xylene were 1.06 at 1.2 ppm and 220 °C, 0.19 at 60 ppm, and 220 °C, and 0.15 at 3.6 ppm and 220 °C, respectively. So, it was found that 220 °C was the optimum temperature to have the best sensitivities. From these results, mixed SnO2 nanoparticles with 1 wt.% MWCNTs showed good sensitivity and selectivity at low power operation below 30 mW. Fabricated micro-gas sensors could be used for ubiquitous sensor network applications to monitor environmental pollutants in the air.

UR - http://www.scopus.com/inward/record.url?scp=77957286196&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77957286196&partnerID=8YFLogxK

U2 - 10.1016/j.snb.2010.07.041

DO - 10.1016/j.snb.2010.07.041

M3 - Article

AN - SCOPUS:77957286196

SN - 0925-4005

VL - 150

SP - 65

EP - 72

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

IS - 1

ER -