Location-specific fabrication of suspended metal nanowire based on electrospun nanofibers on MEMS platform

Yongkeun Oh; Dae Sung Kwon; Wondo Kim; Jongbaeg Kim

doi:10.1109/MEMSYS.2018.8346597

Location-specific fabrication of suspended metal nanowire based on electrospun nanofibers on MEMS platform

Yongkeun Oh, Dae Sung Kwon, Wondo Kim, Jongbaeg Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

In this paper, we propose a location-specific batch fabrication process to form suspended metal nanowire between two microelectrodes. This simple and low temperature fabrication method consists of 3 steps; electrospinning polymer nanofibers on MEMS platform with micro gap, metal evaporation, and dissolving polymer nanofibers in liquid and drying. Here we demonstrate the proposed process with Pd to form suspended Pd nanowire, for the possible future application as hydrogen sensor. The surface tension force during the drying enables the formation of single wire from multiple wires. The proposed method allows diverse choice of nanowire material and thus can find various applications of two-terminal nanowire devices.

Original language	English
Title of host publication	2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	494-497
Number of pages	4
ISBN (Electronic)	9781538647820
DOIs	https://doi.org/10.1109/MEMSYS.2018.8346597
Publication status	Published - 2018 Apr 24
Event	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom Duration: 2018 Jan 21 → 2018 Jan 25

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2018-January
ISSN (Print)	1084-6999

Other

Other	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Country/Territory	United Kingdom
City	Belfast
Period	18/1/21 → 18/1/25

Bibliographical note

Publisher Copyright:
© 2018 IEEE.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2018.8346597

Cite this

Oh, Y., Kwon, D. S., Kim, W., & Kim, J. (2018). Location-specific fabrication of suspended metal nanowire based on electrospun nanofibers on MEMS platform. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 494-497). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346597

Oh, Yongkeun ; Kwon, Dae Sung ; Kim, Wondo et al. / Location-specific fabrication of suspended metal nanowire based on electrospun nanofibers on MEMS platform. 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 494-497 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "Location-specific fabrication of suspended metal nanowire based on electrospun nanofibers on MEMS platform",

abstract = "In this paper, we propose a location-specific batch fabrication process to form suspended metal nanowire between two microelectrodes. This simple and low temperature fabrication method consists of 3 steps; electrospinning polymer nanofibers on MEMS platform with micro gap, metal evaporation, and dissolving polymer nanofibers in liquid and drying. Here we demonstrate the proposed process with Pd to form suspended Pd nanowire, for the possible future application as hydrogen sensor. The surface tension force during the drying enables the formation of single wire from multiple wires. The proposed method allows diverse choice of nanowire material and thus can find various applications of two-terminal nanowire devices.",

author = "Yongkeun Oh and Kwon, {Dae Sung} and Wondo Kim and Jongbaeg Kim",

note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 ; Conference date: 21-01-2018 Through 25-01-2018",

year = "2018",

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doi = "10.1109/MEMSYS.2018.8346597",

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Oh, Y, Kwon, DS, Kim, W & Kim, J 2018, Location-specific fabrication of suspended metal nanowire based on electrospun nanofibers on MEMS platform. in 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2018-January, Institute of Electrical and Electronics Engineers Inc., pp. 494-497, 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom, 18/1/21. https://doi.org/10.1109/MEMSYS.2018.8346597

Location-specific fabrication of suspended metal nanowire based on electrospun nanofibers on MEMS platform. / Oh, Yongkeun; Kwon, Dae Sung; Kim, Wondo et al.
2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 494-497 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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N2 - In this paper, we propose a location-specific batch fabrication process to form suspended metal nanowire between two microelectrodes. This simple and low temperature fabrication method consists of 3 steps; electrospinning polymer nanofibers on MEMS platform with micro gap, metal evaporation, and dissolving polymer nanofibers in liquid and drying. Here we demonstrate the proposed process with Pd to form suspended Pd nanowire, for the possible future application as hydrogen sensor. The surface tension force during the drying enables the formation of single wire from multiple wires. The proposed method allows diverse choice of nanowire material and thus can find various applications of two-terminal nanowire devices.

AB - In this paper, we propose a location-specific batch fabrication process to form suspended metal nanowire between two microelectrodes. This simple and low temperature fabrication method consists of 3 steps; electrospinning polymer nanofibers on MEMS platform with micro gap, metal evaporation, and dissolving polymer nanofibers in liquid and drying. Here we demonstrate the proposed process with Pd to form suspended Pd nanowire, for the possible future application as hydrogen sensor. The surface tension force during the drying enables the formation of single wire from multiple wires. The proposed method allows diverse choice of nanowire material and thus can find various applications of two-terminal nanowire devices.

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BT - 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018

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Oh Y, Kwon DS, Kim W, Kim J. Location-specific fabrication of suspended metal nanowire based on electrospun nanofibers on MEMS platform. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 494-497. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2018.8346597

Location-specific fabrication of suspended metal nanowire based on electrospun nanofibers on MEMS platform

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