Laser-Assisted Thermomechanical Thinning of MoTe2 in Nanoscale Lateral Resolution

Yoonsoo Rho; Hyungjin Kim; Ali Javey; Costas P. Grigoropoulos

doi:10.1002/admi.202200634

Laser-Assisted Thermomechanical Thinning of MoTe₂ in Nanoscale Lateral Resolution

Yoonsoo Rho, Hyungjin Kim, Ali Javey, Costas P. Grigoropoulos

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

A key feature of 2D transition metal dichalcogenides (2D-TMDCs) is that their properties are strongly dependent on their thickness, typically appearing in ultrathin mono- or few- layers. Thus, precise control of functional nanostructure is critical for fundamental research and applications in 2D-TMDCs. Here, atomic layer precision thinning of molybdenum ditelluride (MoTe₂) at nanoscale lateral resolution by introducing laser irradiated hot tip is demonstrated. The contact of the hot tip on MoTe₂ surface promotes oxidation at nanoscale resolution which is simultaneously removed by thermomechanical scribing. This process completes the atomic layer precision thinning of MoTe₂ while maintaining the high crystallinity of thinned MoTe₂ flake. Further, the electrical properties of the MoTe₂ flake are intact after thinning, which proves that the thinned MoTe₂ flake obtained by these methods can potentially be utilized for device fabrication. It is believed that the work will enable applications of 2D-TMDCs that require nanoscale resolution with controlled thickness.

Original language	English
Article number	2200634
Journal	Advanced Materials Interfaces
Volume	9
Issue number	23
DOIs	https://doi.org/10.1002/admi.202200634
Publication status	Published - 2022 Aug 11

Bibliographical note

Funding Information:
Y.R. and H.K. contributed equally to this work. Financial support awarded to the University of California, Berkeley, by the U.S. National Science Foundation (Grant No. CMMI‐2024391) is gratefully acknowledged. The COMSOL simulation was performed at the Molecular Graphics and Computation Facility, University of California, Berkeley, funded by NIH S10OD023532.

Publisher Copyright:
© 2022 Wiley-VCH GmbH.

All Science Journal Classification (ASJC) codes

Mechanics of Materials
Mechanical Engineering

Access to Document

10.1002/admi.202200634

Cite this

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title = "Laser-Assisted Thermomechanical Thinning of MoTe2 in Nanoscale Lateral Resolution",

abstract = "A key feature of 2D transition metal dichalcogenides (2D-TMDCs) is that their properties are strongly dependent on their thickness, typically appearing in ultrathin mono- or few- layers. Thus, precise control of functional nanostructure is critical for fundamental research and applications in 2D-TMDCs. Here, atomic layer precision thinning of molybdenum ditelluride (MoTe2) at nanoscale lateral resolution by introducing laser irradiated hot tip is demonstrated. The contact of the hot tip on MoTe2 surface promotes oxidation at nanoscale resolution which is simultaneously removed by thermomechanical scribing. This process completes the atomic layer precision thinning of MoTe2 while maintaining the high crystallinity of thinned MoTe2 flake. Further, the electrical properties of the MoTe2 flake are intact after thinning, which proves that the thinned MoTe2 flake obtained by these methods can potentially be utilized for device fabrication. It is believed that the work will enable applications of 2D-TMDCs that require nanoscale resolution with controlled thickness.",

author = "Yoonsoo Rho and Hyungjin Kim and Ali Javey and Grigoropoulos, {Costas P.}",

note = "Funding Information: Y.R. and H.K. contributed equally to this work. Financial support awarded to the University of California, Berkeley, by the U.S. National Science Foundation (Grant No. CMMI‐2024391) is gratefully acknowledged. The COMSOL simulation was performed at the Molecular Graphics and Computation Facility, University of California, Berkeley, funded by NIH S10OD023532. Publisher Copyright: {\textcopyright} 2022 Wiley-VCH GmbH.",

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AU - Grigoropoulos, Costas P.

N1 - Funding Information: Y.R. and H.K. contributed equally to this work. Financial support awarded to the University of California, Berkeley, by the U.S. National Science Foundation (Grant No. CMMI‐2024391) is gratefully acknowledged. The COMSOL simulation was performed at the Molecular Graphics and Computation Facility, University of California, Berkeley, funded by NIH S10OD023532. Publisher Copyright: © 2022 Wiley-VCH GmbH.

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N2 - A key feature of 2D transition metal dichalcogenides (2D-TMDCs) is that their properties are strongly dependent on their thickness, typically appearing in ultrathin mono- or few- layers. Thus, precise control of functional nanostructure is critical for fundamental research and applications in 2D-TMDCs. Here, atomic layer precision thinning of molybdenum ditelluride (MoTe2) at nanoscale lateral resolution by introducing laser irradiated hot tip is demonstrated. The contact of the hot tip on MoTe2 surface promotes oxidation at nanoscale resolution which is simultaneously removed by thermomechanical scribing. This process completes the atomic layer precision thinning of MoTe2 while maintaining the high crystallinity of thinned MoTe2 flake. Further, the electrical properties of the MoTe2 flake are intact after thinning, which proves that the thinned MoTe2 flake obtained by these methods can potentially be utilized for device fabrication. It is believed that the work will enable applications of 2D-TMDCs that require nanoscale resolution with controlled thickness.

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