Large-area laser printing of Ag thick film pattern with stepwise edge morphology

Hyeongjae Lee; Hyunkwon Shin; Myeongkyu Lee

doi:10.1016/j.optlaseng.2009.10.004

Large-area laser printing of Ag thick film pattern with stepwise edge morphology

Hyeongjae Lee, Hyunkwon Shin, Myeongkyu Lee

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

We here report that Ag thick films solution deposited on transparent substrate can be printed onto such receiver substrates as glass and Si by a spatially modulated Nd:YAG pulsed laser beam incident from the backside of the source substrate. High-fidelity patterns with a minimum feature size of ∼10 μm could be fabricated over several square centimeters by a single pulse with energy 850 mJ. The printed film, followed by annealing at 450 °C, exhibited a linear voltage-current relation and the sheet resistance decreased with increasing thickness. Ag films as thick as 1.8 μm could be printed with stepwise edge morphology when they were properly dried prior to printing. A very low sheet resistance of 0.14 Ω/sq was observed for this thickness.

Original language	English
Pages (from-to)	380-384
Number of pages	5
Journal	Optics and Lasers in Engineering
Volume	48
Issue number	3
DOIs	https://doi.org/10.1016/j.optlaseng.2009.10.004
Publication status	Published - 2010 Mar

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1016/j.optlaseng.2009.10.004

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title = "Large-area laser printing of Ag thick film pattern with stepwise edge morphology",

abstract = "We here report that Ag thick films solution deposited on transparent substrate can be printed onto such receiver substrates as glass and Si by a spatially modulated Nd:YAG pulsed laser beam incident from the backside of the source substrate. High-fidelity patterns with a minimum feature size of ∼10 μm could be fabricated over several square centimeters by a single pulse with energy 850 mJ. The printed film, followed by annealing at 450 °C, exhibited a linear voltage-current relation and the sheet resistance decreased with increasing thickness. Ag films as thick as 1.8 μm could be printed with stepwise edge morphology when they were properly dried prior to printing. A very low sheet resistance of 0.14 Ω/sq was observed for this thickness.",

author = "Hyeongjae Lee and Hyunkwon Shin and Myeongkyu Lee",

year = "2010",

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doi = "10.1016/j.optlaseng.2009.10.004",

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N2 - We here report that Ag thick films solution deposited on transparent substrate can be printed onto such receiver substrates as glass and Si by a spatially modulated Nd:YAG pulsed laser beam incident from the backside of the source substrate. High-fidelity patterns with a minimum feature size of ∼10 μm could be fabricated over several square centimeters by a single pulse with energy 850 mJ. The printed film, followed by annealing at 450 °C, exhibited a linear voltage-current relation and the sheet resistance decreased with increasing thickness. Ag films as thick as 1.8 μm could be printed with stepwise edge morphology when they were properly dried prior to printing. A very low sheet resistance of 0.14 Ω/sq was observed for this thickness.

AB - We here report that Ag thick films solution deposited on transparent substrate can be printed onto such receiver substrates as glass and Si by a spatially modulated Nd:YAG pulsed laser beam incident from the backside of the source substrate. High-fidelity patterns with a minimum feature size of ∼10 μm could be fabricated over several square centimeters by a single pulse with energy 850 mJ. The printed film, followed by annealing at 450 °C, exhibited a linear voltage-current relation and the sheet resistance decreased with increasing thickness. Ag films as thick as 1.8 μm could be printed with stepwise edge morphology when they were properly dried prior to printing. A very low sheet resistance of 0.14 Ω/sq was observed for this thickness.

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JO - Optics and Lasers in Engineering

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ER -

Large-area laser printing of Ag thick film pattern with stepwise edge morphology

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All Science Journal Classification (ASJC) codes

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