K and Ka-band silicon micromachined evanescent mode resonators

Alexandros Margomenos; Yongshik Lee; Andrew Kuo; Alok Jain; Jiyun Munn; Kazem Sabet; Linda P.B. Katehi

doi:10.1109/EUMC.2007.4405223

K and Ka-band silicon micromachined evanescent mode resonators

Alexandros Margomenos, Yongshik Lee, Andrew Kuo, Alok Jain, Jiyun Munn, Kazem Sabet, Linda P.B. Katehi

Department of Electrical and Electronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

High-Q silicon micromachined evanescent-mode resonators for K and Ka-band are investigated. Such structures can be realized by loading a below the cut-off waveguide cavity with capacitive posts and can easily be combined to form multi-pole filters. The capacitive post placed inside the cavity lowers its resonant frequency. Therefore, compared to a resonant cavity, the size of the evanescent cavity is dramatically reduced, while still achieving the same resonant frequency. The loss also increases, but relatively high unloaded quality factor can be maintained. Design methods with full-wave analysis and circuit-modeling results are presented. Experimental results for K and Ka-band resonators are also presented.

Original language	English
Title of host publication	Proceedings of the 37th European Microwave Conference, EUMC
Pages	446-449
Number of pages	4
DOIs	https://doi.org/10.1109/EUMC.2007.4405223
Publication status	Published - 2007
Event	37th European Microwave Conference, EUMC - Munich, Germany Duration: 2007 Oct 9 → 2007 Oct 12

Publication series

Name	Proceedings of the 37th European Microwave Conference, EUMC

Other

Other	37th European Microwave Conference, EUMC
Country/Territory	Germany
City	Munich
Period	07/10/9 → 07/10/12

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Access to Document

10.1109/EUMC.2007.4405223

Cite this

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title = "K and Ka-band silicon micromachined evanescent mode resonators",

abstract = "High-Q silicon micromachined evanescent-mode resonators for K and Ka-band are investigated. Such structures can be realized by loading a below the cut-off waveguide cavity with capacitive posts and can easily be combined to form multi-pole filters. The capacitive post placed inside the cavity lowers its resonant frequency. Therefore, compared to a resonant cavity, the size of the evanescent cavity is dramatically reduced, while still achieving the same resonant frequency. The loss also increases, but relatively high unloaded quality factor can be maintained. Design methods with full-wave analysis and circuit-modeling results are presented. Experimental results for K and Ka-band resonators are also presented.",

author = "Alexandros Margomenos and Yongshik Lee and Andrew Kuo and Alok Jain and Jiyun Munn and Kazem Sabet and Katehi, {Linda P.B.}",

year = "2007",

doi = "10.1109/EUMC.2007.4405223",

language = "English",

isbn = "9782874870033",

series = "Proceedings of the 37th European Microwave Conference, EUMC",

pages = "446--449",

booktitle = "Proceedings of the 37th European Microwave Conference, EUMC",

note = "37th European Microwave Conference, EUMC ; Conference date: 09-10-2007 Through 12-10-2007",

}

Margomenos, A, Lee, Y, Kuo, A, Jain, A, Munn, J, Sabet, K & Katehi, LPB 2007, K and Ka-band silicon micromachined evanescent mode resonators. in Proceedings of the 37th European Microwave Conference, EUMC., 4405223, Proceedings of the 37th European Microwave Conference, EUMC, pp. 446-449, 37th European Microwave Conference, EUMC, Munich, Germany, 07/10/9. https://doi.org/10.1109/EUMC.2007.4405223

TY - GEN

T1 - K and Ka-band silicon micromachined evanescent mode resonators

AU - Margomenos, Alexandros

AU - Lee, Yongshik

AU - Kuo, Andrew

AU - Jain, Alok

AU - Munn, Jiyun

AU - Sabet, Kazem

AU - Katehi, Linda P.B.

PY - 2007

Y1 - 2007

N2 - High-Q silicon micromachined evanescent-mode resonators for K and Ka-band are investigated. Such structures can be realized by loading a below the cut-off waveguide cavity with capacitive posts and can easily be combined to form multi-pole filters. The capacitive post placed inside the cavity lowers its resonant frequency. Therefore, compared to a resonant cavity, the size of the evanescent cavity is dramatically reduced, while still achieving the same resonant frequency. The loss also increases, but relatively high unloaded quality factor can be maintained. Design methods with full-wave analysis and circuit-modeling results are presented. Experimental results for K and Ka-band resonators are also presented.

AB - High-Q silicon micromachined evanescent-mode resonators for K and Ka-band are investigated. Such structures can be realized by loading a below the cut-off waveguide cavity with capacitive posts and can easily be combined to form multi-pole filters. The capacitive post placed inside the cavity lowers its resonant frequency. Therefore, compared to a resonant cavity, the size of the evanescent cavity is dramatically reduced, while still achieving the same resonant frequency. The loss also increases, but relatively high unloaded quality factor can be maintained. Design methods with full-wave analysis and circuit-modeling results are presented. Experimental results for K and Ka-band resonators are also presented.

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U2 - 10.1109/EUMC.2007.4405223

DO - 10.1109/EUMC.2007.4405223

M3 - Conference contribution

AN - SCOPUS:48349113053

SN - 9782874870033

T3 - Proceedings of the 37th European Microwave Conference, EUMC

SP - 446

EP - 449

BT - Proceedings of the 37th European Microwave Conference, EUMC

T2 - 37th European Microwave Conference, EUMC

Y2 - 9 October 2007 through 12 October 2007

ER -

K and Ka-band silicon micromachined evanescent mode resonators

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