K and Ka-band silicon micromachined evanescent mode resonators

Alexandros Margomenos, Yongshik Lee, Andrew Kuo, Alok Jain, Jiyun Munn, Kazem Sabet, Linda P.B. Katehi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)


High-Q silicon micromachined evanescent-mode resonators for K and Ka-band are investigated. Such structures can be realized by loading a below the cut-off waveguide cavity with capacitive posts and can easily be combined to form multi-pole filters. The capacitive post placed inside the cavity lowers its resonant frequency. Therefore, compared to a resonant cavity, the size of the evanescent cavity is dramatically reduced, while still achieving the same resonant frequency. The loss also increases, but relatively high unloaded quality factor can be maintained. Design methods with full-wave analysis and circuit-modeling results are presented. Experimental results for K and Ka-band resonators are also presented.

Original languageEnglish
Title of host publicationProceedings of the 37th European Microwave Conference, EUMC
Number of pages4
Publication statusPublished - 2007
Event37th European Microwave Conference, EUMC - Munich, Germany
Duration: 2007 Oct 92007 Oct 12

Publication series

NameProceedings of the 37th European Microwave Conference, EUMC


Other37th European Microwave Conference, EUMC

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering


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