Integrated total-NOX-evaluation-chip for simultaneous conversion and detection of noX in air

S. I. Yoon; H. R. Ahn; J. Yoon; S. Song; Y. J. Kim

doi:10.1109/MEMSYS.2011.5734570

Integrated total-NO_X-evaluation-chip for simultaneous conversion and detection of no_X in air

S. I. Yoon, H. R. Ahn, J. Yoon, S. Song, Y. J. Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

An integrated Total-NO_x-Evaluation-Chip (TNEC) is being proposed for real-time and point-of-interest evaluation of total NO_x in air. It consists of a Micro-Electric-NO_x -Converter (μENC) and a Thermoelectric-Gas-Sensor(TGS). In the μENC, the NO_x is treated with a corona-discharge. Then, in the TGS, the treated NO_x is detected by using a catalytic reaction and a thermoelectric effect. The fabricated TNEC electrically converted NO_x mixture from various mixing-rates to a fixed-mixing-rate of about 25%, and detected it with the sensitivity of 4.65×10^-2μV/ppm.

Original language	English
Title of host publication	2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
Pages	897-899
Number of pages	3
DOIs	https://doi.org/10.1109/MEMSYS.2011.5734570
Publication status	Published - 2011
Event	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico Duration: 2011 Jan 23 → 2011 Jan 27

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Country/Territory	Mexico
City	Cancun
Period	11/1/23 → 11/1/27

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2011.5734570

Cite this

Yoon, S. I., Ahn, H. R., Yoon, J., Song, S., & Kim, Y. J. (2011). Integrated total-NO_X-evaluation-chip for simultaneous conversion and detection of no_X in air. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 897-899). Article 5734570 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2011.5734570

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title = "Integrated total-NOX-evaluation-chip for simultaneous conversion and detection of noX in air",

abstract = "An integrated Total-NOx-Evaluation-Chip (TNEC) is being proposed for real-time and point-of-interest evaluation of total NOx in air. It consists of a Micro-Electric-NOx -Converter (μENC) and a Thermoelectric-Gas-Sensor(TGS). In the μENC, the NOx is treated with a corona-discharge. Then, in the TGS, the treated NOx is detected by using a catalytic reaction and a thermoelectric effect. The fabricated TNEC electrically converted NOx mixture from various mixing-rates to a fixed-mixing-rate of about 25%, and detected it with the sensitivity of 4.65×10-2μV/ppm.",

author = "Yoon, {S. I.} and Ahn, {H. R.} and J. Yoon and S. Song and Kim, {Y. J.}",

year = "2011",

doi = "10.1109/MEMSYS.2011.5734570",

language = "English",

isbn = "9781424496327",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "897--899",

booktitle = "2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011",

note = "24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 ; Conference date: 23-01-2011 Through 27-01-2011",

}

Yoon, SI, Ahn, HR, Yoon, J, Song, S & Kim, YJ 2011, Integrated total-NO_X-evaluation-chip for simultaneous conversion and detection of no_X in air. in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011., 5734570, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 897-899, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 11/1/23. https://doi.org/10.1109/MEMSYS.2011.5734570

Integrated total-NO_X-evaluation-chip for simultaneous conversion and detection of no_X in air. / Yoon, S. I.; Ahn, H. R.; Yoon, J. et al.
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. p. 897-899 5734570 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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Yoon SI, Ahn HR, Yoon J, Song S , Kim YJ. Integrated total-NO_X-evaluation-chip for simultaneous conversion and detection of no_X in air. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011. 2011. p. 897-899. 5734570. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2011.5734570