Integrated carbon nanotube arrays for reliable contact in electromechanical memory device

Jungwook Choi; Youngkee Eun; Jongbaeg Kim

doi:10.1109/MEMSYS.2012.6170400

Integrated carbon nanotube arrays for reliable contact in electromechanical memory device

Jungwook Choi, Youngkee Eun, Jongbaeg Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A reliable electromechanical memory device using aligned carbon nanotube (CNT) arrays as contact material has been developed. The aligned CNT arrays were integrated by chemical vapor deposition (CVD) on microstructures making mechanical contact. The contact showed hysteretic pull-out and -in behaviors which enabled on- and off-state readout, and the memory logic was programmed based on adhesive force between the CNT arrays and actuation of shuttle. On the basis of intimate interfacial contact between CNT arrays, and remarkable electrical and mechanical properties of CNT, the reliability experiment showed durable contact characteristic for over 1.1×10 ⁶ cycles of 20 mA hot-switching operation.

Original language	English
Title of host publication	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages	1316-1319
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2012.6170400
Publication status	Published - 2012
Event	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France Duration: 2012 Jan 29 → 2012 Feb 2

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/Territory	France
City	Paris
Period	12/1/29 → 12/2/2

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2012.6170400

Cite this

Choi, J., Eun, Y., & Kim, J. (2012). Integrated carbon nanotube arrays for reliable contact in electromechanical memory device. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 (pp. 1316-1319). [6170400] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2012.6170400

@inproceedings{5827065ca7d54ac5b60fd913f354f023,

title = "Integrated carbon nanotube arrays for reliable contact in electromechanical memory device",

abstract = "A reliable electromechanical memory device using aligned carbon nanotube (CNT) arrays as contact material has been developed. The aligned CNT arrays were integrated by chemical vapor deposition (CVD) on microstructures making mechanical contact. The contact showed hysteretic pull-out and -in behaviors which enabled on- and off-state readout, and the memory logic was programmed based on adhesive force between the CNT arrays and actuation of shuttle. On the basis of intimate interfacial contact between CNT arrays, and remarkable electrical and mechanical properties of CNT, the reliability experiment showed durable contact characteristic for over 1.1×10 6 cycles of 20 mA hot-switching operation.",

author = "Jungwook Choi and Youngkee Eun and Jongbaeg Kim",

year = "2012",

doi = "10.1109/MEMSYS.2012.6170400",

language = "English",

isbn = "9781467303248",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "1316--1319",

booktitle = "2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012",

note = "2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 ; Conference date: 29-01-2012 Through 02-02-2012",

}

Choi, J, Eun, Y & Kim, J 2012, Integrated carbon nanotube arrays for reliable contact in electromechanical memory device. in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012., 6170400, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1316-1319, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 12/1/29. https://doi.org/10.1109/MEMSYS.2012.6170400

Integrated carbon nanotube arrays for reliable contact in electromechanical memory device. / Choi, Jungwook; Eun, Youngkee; Kim, Jongbaeg.
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 1316-1319 6170400 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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T1 - Integrated carbon nanotube arrays for reliable contact in electromechanical memory device

AU - Choi, Jungwook

AU - Eun, Youngkee

AU - Kim, Jongbaeg

PY - 2012

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N2 - A reliable electromechanical memory device using aligned carbon nanotube (CNT) arrays as contact material has been developed. The aligned CNT arrays were integrated by chemical vapor deposition (CVD) on microstructures making mechanical contact. The contact showed hysteretic pull-out and -in behaviors which enabled on- and off-state readout, and the memory logic was programmed based on adhesive force between the CNT arrays and actuation of shuttle. On the basis of intimate interfacial contact between CNT arrays, and remarkable electrical and mechanical properties of CNT, the reliability experiment showed durable contact characteristic for over 1.1×10 6 cycles of 20 mA hot-switching operation.

AB - A reliable electromechanical memory device using aligned carbon nanotube (CNT) arrays as contact material has been developed. The aligned CNT arrays were integrated by chemical vapor deposition (CVD) on microstructures making mechanical contact. The contact showed hysteretic pull-out and -in behaviors which enabled on- and off-state readout, and the memory logic was programmed based on adhesive force between the CNT arrays and actuation of shuttle. On the basis of intimate interfacial contact between CNT arrays, and remarkable electrical and mechanical properties of CNT, the reliability experiment showed durable contact characteristic for over 1.1×10 6 cycles of 20 mA hot-switching operation.

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 1316

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BT - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012

T2 - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012

Y2 - 29 January 2012 through 2 February 2012

ER -

Integrated carbon nanotube arrays for reliable contact in electromechanical memory device

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