Integrated carbon nanotube array as dry adhesive for high-temperature silicon processing

Youngkee Eun; Jae Ik Lee; Jungwook Choi; Youngsup Song; Jongbaeg Kim

doi:10.1002/adma.201102331

Integrated carbon nanotube array as dry adhesive for high-temperature silicon processing

Youngkee Eun, Jae Ik Lee, Jungwook Choi, Youngsup Song, Jongbaeg Kim

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

23 Citations (Scopus)

Abstract

CNT arrays are used as removable dry adhesives for high-temperature processes with temperatures that increase by as much as 900 °C. The adhesion force between the self-assembled CNTs is utilized to strain the microstructures in high-temperature environments. Arrays of analog micromirrors are successfully fabricated by silicon processing. The proposed method significantly simplifies the fabrication process.

Original language	English
Pages (from-to)	4285-4289
Number of pages	5
Journal	Advanced Materials
Volume	23
Issue number	37
DOIs	https://doi.org/10.1002/adma.201102331
Publication status	Published - 2011 Oct 4

All Science Journal Classification (ASJC) codes

Materials Science(all)
Mechanics of Materials
Mechanical Engineering

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10.1002/adma.201102331

Cite this

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title = "Integrated carbon nanotube array as dry adhesive for high-temperature silicon processing",

abstract = "CNT arrays are used as removable dry adhesives for high-temperature processes with temperatures that increase by as much as 900 °C. The adhesion force between the self-assembled CNTs is utilized to strain the microstructures in high-temperature environments. Arrays of analog micromirrors are successfully fabricated by silicon processing. The proposed method significantly simplifies the fabrication process.",

author = "Youngkee Eun and Lee, {Jae Ik} and Jungwook Choi and Youngsup Song and Jongbaeg Kim",

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AU - Eun, Youngkee

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AU - Choi, Jungwook

AU - Song, Youngsup

AU - Kim, Jongbaeg

PY - 2011/10/4

Y1 - 2011/10/4

N2 - CNT arrays are used as removable dry adhesives for high-temperature processes with temperatures that increase by as much as 900 °C. The adhesion force between the self-assembled CNTs is utilized to strain the microstructures in high-temperature environments. Arrays of analog micromirrors are successfully fabricated by silicon processing. The proposed method significantly simplifies the fabrication process.

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Integrated carbon nanotube array as dry adhesive for high-temperature silicon processing

Abstract

All Science Journal Classification (ASJC) codes

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