Influence of upper layer on measuring thermal conductivity of multilayer thin films using differential 3-ω method

Sangwoo Shin; Han Na Cho; Beom Seok Kim; Hyung Hee Cho

doi:10.1016/j.tsf.2008.06.090

Influence of upper layer on measuring thermal conductivity of multilayer thin films using differential 3-ω method

Sangwoo Shin, Han Na Cho, Beom Seok Kim, Hyung Hee Cho

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

21 Citations (Scopus)

Abstract

We present an intrinsic error in differential 3-ω measurement method due to two-dimensional heat spreading effect in the upper layer of the target film. By measuring thermal conductivities of 300 nm PECVD-grown silicon dioxide thin films with various thicknesses of upper layers, significant heat spreading effect is observed. Also, analytical modeling regarding apparent thin film thermal conductivity is conducted for verification of experimental results. Experimental results as well as analytical results show that the measurement error tends to increase with thickness of upper layer due to two-dimensional heat spreading effect.

Original language	English
Pages (from-to)	933-936
Number of pages	4
Journal	Thin Solid Films
Volume	517
Issue number	2
DOIs	https://doi.org/10.1016/j.tsf.2008.06.090
Publication status	Published - 2008 Nov 28

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2008.06.090

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abstract = "We present an intrinsic error in differential 3-ω measurement method due to two-dimensional heat spreading effect in the upper layer of the target film. By measuring thermal conductivities of 300 nm PECVD-grown silicon dioxide thin films with various thicknesses of upper layers, significant heat spreading effect is observed. Also, analytical modeling regarding apparent thin film thermal conductivity is conducted for verification of experimental results. Experimental results as well as analytical results show that the measurement error tends to increase with thickness of upper layer due to two-dimensional heat spreading effect.",

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AU - Shin, Sangwoo

AU - Cho, Han Na

AU - Kim, Beom Seok

AU - Cho, Hyung Hee

PY - 2008/11/28

Y1 - 2008/11/28

N2 - We present an intrinsic error in differential 3-ω measurement method due to two-dimensional heat spreading effect in the upper layer of the target film. By measuring thermal conductivities of 300 nm PECVD-grown silicon dioxide thin films with various thicknesses of upper layers, significant heat spreading effect is observed. Also, analytical modeling regarding apparent thin film thermal conductivity is conducted for verification of experimental results. Experimental results as well as analytical results show that the measurement error tends to increase with thickness of upper layer due to two-dimensional heat spreading effect.

AB - We present an intrinsic error in differential 3-ω measurement method due to two-dimensional heat spreading effect in the upper layer of the target film. By measuring thermal conductivities of 300 nm PECVD-grown silicon dioxide thin films with various thicknesses of upper layers, significant heat spreading effect is observed. Also, analytical modeling regarding apparent thin film thermal conductivity is conducted for verification of experimental results. Experimental results as well as analytical results show that the measurement error tends to increase with thickness of upper layer due to two-dimensional heat spreading effect.

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JO - Thin Solid Films

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Influence of upper layer on measuring thermal conductivity of multilayer thin films using differential 3-ω method

Abstract

All Science Journal Classification (ASJC) codes

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