Incorporation of graphene into direct-patternable transparent conducting oxide thin films

Transparent metal oxide thin films, such as zinc oxide (ZnO) and tin dioxide (SnO₂) thin films, have been increasingly studied due to their high optical transparency with electrical conducting property, high chemical durability and low cost. An incorporation of graphene into direct-patternable transparent metal oxide thin films was carried out to enhance the electrical conducting property. Metal precursors, solvent, and photosensitive additive were used for the synthesis of stock solutions. After addition of graphene, the solution was spin-coated and the coated film was exposed to ultraviolet (UV) light of 365 nm. Then, the UV exposed film was washed by solvent and the direct-patterned film was annealed to form a desired pure phase system. From the results of UV-vis spectra, X-ray diffractometer, Hall effect measurement and photoelectron spectroscopy of the graphene incorporated metal oxide thin films, we can deduce the effect of graphene in transparent metal oxide thin films.