Improvement of plasma uniformity using ZnO-coated dielectric barrier discharge in open air

Jai Hyuk Choi; Tae Ii Lee; Inho Han; Byeong Yun Oh; Min Chang Jeong; Jae Min Myoung; Hong Koo Baik; Kie Moon Song; Yong Sik Lim

doi:10.1063/1.2338571

Improvement of plasma uniformity using ZnO-coated dielectric barrier discharge in open air

Jai Hyuk Choi, Tae Ii Lee, Inho Han, Byeong Yun Oh, Min Chang Jeong, Jae Min Myoung, Hong Koo Baik, Kie Moon Song, Yong Sik Lim

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

29 Citations (Scopus)

Abstract

The discharge behavior in atmospheric pressure dielectric barrier discharge using ZnO-coated dielectric layer is examined. ZnO thin film on alumina using rf magnetron sputter causes about a factor of a million higher surface conductivity than bare alumina surface. Experimental result shows that discharge uniformity is improved definitely in the case of ZnO-coated dielectric barrier discharge. Increase of surface conductivity stimulates charges to spread over the dielectric surface widely. These charge spreading enhances the uniformity and the stability of atmospheric pressure discharge in open air by initiation of consecutive streamers.

Original language	English
Article number	081501
Journal	Applied Physics Letters
Volume	89
Issue number	8
DOIs	https://doi.org/10.1063/1.2338571
Publication status	Published - 2006

Bibliographical note

Funding Information:
This work was supported by Grant No. R01-2003-000-10476-0 from the Basic Research Program of the Korea Science and Engineering Foundation.

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.2338571

Cite this

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title = "Improvement of plasma uniformity using ZnO-coated dielectric barrier discharge in open air",

abstract = "The discharge behavior in atmospheric pressure dielectric barrier discharge using ZnO-coated dielectric layer is examined. ZnO thin film on alumina using rf magnetron sputter causes about a factor of a million higher surface conductivity than bare alumina surface. Experimental result shows that discharge uniformity is improved definitely in the case of ZnO-coated dielectric barrier discharge. Increase of surface conductivity stimulates charges to spread over the dielectric surface widely. These charge spreading enhances the uniformity and the stability of atmospheric pressure discharge in open air by initiation of consecutive streamers.",

author = "Choi, {Jai Hyuk} and Lee, {Tae Ii} and Inho Han and Oh, {Byeong Yun} and Jeong, {Min Chang} and Myoung, {Jae Min} and Baik, {Hong Koo} and Song, {Kie Moon} and Lim, {Yong Sik}",

note = "Funding Information: This work was supported by Grant No. R01-2003-000-10476-0 from the Basic Research Program of the Korea Science and Engineering Foundation.",

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doi = "10.1063/1.2338571",

language = "English",

volume = "89",

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T1 - Improvement of plasma uniformity using ZnO-coated dielectric barrier discharge in open air

AU - Choi, Jai Hyuk

AU - Lee, Tae Ii

AU - Han, Inho

AU - Oh, Byeong Yun

AU - Jeong, Min Chang

AU - Myoung, Jae Min

AU - Baik, Hong Koo

AU - Song, Kie Moon

AU - Lim, Yong Sik

N1 - Funding Information: This work was supported by Grant No. R01-2003-000-10476-0 from the Basic Research Program of the Korea Science and Engineering Foundation.

PY - 2006

Y1 - 2006

N2 - The discharge behavior in atmospheric pressure dielectric barrier discharge using ZnO-coated dielectric layer is examined. ZnO thin film on alumina using rf magnetron sputter causes about a factor of a million higher surface conductivity than bare alumina surface. Experimental result shows that discharge uniformity is improved definitely in the case of ZnO-coated dielectric barrier discharge. Increase of surface conductivity stimulates charges to spread over the dielectric surface widely. These charge spreading enhances the uniformity and the stability of atmospheric pressure discharge in open air by initiation of consecutive streamers.

AB - The discharge behavior in atmospheric pressure dielectric barrier discharge using ZnO-coated dielectric layer is examined. ZnO thin film on alumina using rf magnetron sputter causes about a factor of a million higher surface conductivity than bare alumina surface. Experimental result shows that discharge uniformity is improved definitely in the case of ZnO-coated dielectric barrier discharge. Increase of surface conductivity stimulates charges to spread over the dielectric surface widely. These charge spreading enhances the uniformity and the stability of atmospheric pressure discharge in open air by initiation of consecutive streamers.

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Improvement of plasma uniformity using ZnO-coated dielectric barrier discharge in open air

Abstract

Bibliographical note

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