Abstract
A (NH4)2Sx solution treatment technique was applied to a GaAs metal-semiconductor field-effect transistor (MESFET) to improve the electrical properties of the transistor. The gate leakage current of the MESFET remarkably decreased while the drain breakdown voltage doubled to 30 V with the (NH4)2Sx treatment. The (NH 4)2Sx treatment was found to effectively suppress the formation of donor-type defects at the GaAs surface and to increase the Schottky barrier height.
Original language | English |
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Pages (from-to) | 3539-3542 |
Number of pages | 4 |
Journal | Journal of Applied Physics |
Volume | 73 |
Issue number | 7 |
DOIs | |
Publication status | Published - 1993 |
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)