Improvement in electrical properties of sol–gel-derived In-doped ZnO thin film by electron beam treatment

Solbaro Kim, Changheon Kim, Jihoon Na, Eunseok Oh, Chaehwan Jeong, Sangwoo Lim

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)


Abstract: In-doped ZnO thin films were prepared by a sol–gel spin coating method. Since several issues with In doping have been reported, such as degradation of crystallinity and deterioration of electrical resistivity at high In-doping levels, co-doping with Ga and electron beam treatment was demonstrated in this study. When In dopant was added to the ZnO thin film at 0.5 mol%, it increased the carrier concentration, thereby reducing the resistivity of the film. In contrast, further doping by Ga in the presence of In did not significantly change the electrical properties. When electron beam treatment was conducted on ZnO films, the optical band gap was increased and the carrier concentration and mobility were increased. In particular, a 0.5 mol% In-doped ZnO that received electron beam treatment at 2 keV exhibited an electrical resistivity as low as 4.8 × 10−2 Ω cm, while 57.1 Ω cm was obtained from the pristine ZnO thin film. When the ZnO films were applied to crystalline Si solar cells, conversion efficiency significantly increased from 10.37 % for the cell with pristine ZnO thin film to 11.45 % with the In-doped and electron beam-treated ZnO thin film.

Original languageEnglish
Pages (from-to)790-799
Number of pages10
JournalJournal of Sol-Gel Science and Technology
Issue number3
Publication statusPublished - 2015 Jun 1

Bibliographical note

Funding Information:
This work was supported by the Priority Research Centers Program (2009-0093823) and the Basic Science Research Program (NRF-2013R1A1A2008788) through the National Research Foundation of Korea (NRF) funded by the Ministry of Education.

Publisher Copyright:
© 2015, Springer Science+Business Media New York.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Chemistry(all)
  • Biomaterials
  • Condensed Matter Physics
  • Materials Chemistry


Dive into the research topics of 'Improvement in electrical properties of sol–gel-derived In-doped ZnO thin film by electron beam treatment'. Together they form a unique fingerprint.

Cite this