Improvement in Chemiresistive Response of SnO2Thin Film by RuO2-Nanosheets-Functionalization and Its Application to Highly Sensitive Ethanol Sensor

Wonkeun Park; Yunsung Kang; Xiaoyan Jin; Dongseok Lee; Seong Ju Hwang; Jongbaeg Kim

doi:10.1109/MEMS58180.2024.10439557

Improvement in Chemiresistive Response of SnO₂Thin Film by RuO₂-Nanosheets-Functionalization and Its Application to Highly Sensitive Ethanol Sensor

Wonkeun Park, Yunsung Kang, Xiaoyan Jin, Dongseok Lee, Seong Ju Hwang, Jongbaeg Kim

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

This paper introduces the use of ruthenium dioxide (RuO2) nanosheets as a catalyst in gas sensors, significantly enhancing the chemiresistive response of tin dioxide (SnO2) thin films for ethanol detection. The RuO2-functionalized device, integrated with a microheater for low-power operation, demonstrates a 243% improved response to 10 ppm ethanol compared to that of pristine SnO2. The sensor is operable at 250 with 18 mW power and fabricated with bulk-micromachining, thus these could be suitable for portable applications. Additionally, the sensor's performance at exposure to ethanol at various concentrations down to 500 ppb is characterized.

Original language	English
Title of host publication	IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	863-866
Number of pages	4
ISBN (Electronic)	9798350357929
DOIs	https://doi.org/10.1109/MEMS58180.2024.10439557
Publication status	Published - 2024
Event	37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024 - Austin, United States Duration: 2024 Jan 21 → 2024 Jan 25

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024
Country/Territory	United States
City	Austin
Period	24/1/21 → 24/1/25

Bibliographical note

Publisher Copyright:
© 2024 IEEE.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMS58180.2024.10439557

Cite this

Park, W., Kang, Y., Jin, X., Lee, D., Hwang, S. J., & Kim, J. (2024). Improvement in Chemiresistive Response of SnO₂Thin Film by RuO₂-Nanosheets-Functionalization and Its Application to Highly Sensitive Ethanol Sensor. In IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024 (pp. 863-866). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS58180.2024.10439557

Park, Wonkeun ; Kang, Yunsung ; Jin, Xiaoyan et al. / Improvement in Chemiresistive Response of SnO₂Thin Film by RuO₂-Nanosheets-Functionalization and Its Application to Highly Sensitive Ethanol Sensor. IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024. Institute of Electrical and Electronics Engineers Inc., 2024. pp. 863-866 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{37b3c751fbcd45e1ba440ea8e4e48566,

title = "Improvement in Chemiresistive Response of SnO2Thin Film by RuO2-Nanosheets-Functionalization and Its Application to Highly Sensitive Ethanol Sensor",

abstract = "This paper introduces the use of ruthenium dioxide (RuO2) nanosheets as a catalyst in gas sensors, significantly enhancing the chemiresistive response of tin dioxide (SnO2) thin films for ethanol detection. The RuO2-functionalized device, integrated with a microheater for low-power operation, demonstrates a 243% improved response to 10 ppm ethanol compared to that of pristine SnO2. The sensor is operable at 250 with 18 mW power and fabricated with bulk-micromachining, thus these could be suitable for portable applications. Additionally, the sensor's performance at exposure to ethanol at various concentrations down to 500 ppb is characterized.",

keywords = "Chemireistive gas sensor, Ethanol gas detection, Ruthenium dioxide nanosheets, Suspended gas sensor platform",

author = "Wonkeun Park and Yunsung Kang and Xiaoyan Jin and Dongseok Lee and Hwang, {Seong Ju} and Jongbaeg Kim",

note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024 ; Conference date: 21-01-2024 Through 25-01-2024",

year = "2024",

doi = "10.1109/MEMS58180.2024.10439557",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "863--866",

booktitle = "IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024",

address = "United States",

}

Park, W, Kang, Y, Jin, X, Lee, D, Hwang, SJ & Kim, J 2024, Improvement in Chemiresistive Response of SnO₂Thin Film by RuO₂-Nanosheets-Functionalization and Its Application to Highly Sensitive Ethanol Sensor. in IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 863-866, 37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024, Austin, United States, 24/1/21. https://doi.org/10.1109/MEMS58180.2024.10439557

Improvement in Chemiresistive Response of SnO₂Thin Film by RuO₂-Nanosheets-Functionalization and Its Application to Highly Sensitive Ethanol Sensor. / Park, Wonkeun; Kang, Yunsung; Jin, Xiaoyan et al.
IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024. Institute of Electrical and Electronics Engineers Inc., 2024. p. 863-866 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Improvement in Chemiresistive Response of SnO2Thin Film by RuO2-Nanosheets-Functionalization and Its Application to Highly Sensitive Ethanol Sensor

AU - Park, Wonkeun

AU - Kang, Yunsung

AU - Jin, Xiaoyan

AU - Lee, Dongseok

AU - Hwang, Seong Ju

AU - Kim, Jongbaeg

PY - 2024

Y1 - 2024

N2 - This paper introduces the use of ruthenium dioxide (RuO2) nanosheets as a catalyst in gas sensors, significantly enhancing the chemiresistive response of tin dioxide (SnO2) thin films for ethanol detection. The RuO2-functionalized device, integrated with a microheater for low-power operation, demonstrates a 243% improved response to 10 ppm ethanol compared to that of pristine SnO2. The sensor is operable at 250 with 18 mW power and fabricated with bulk-micromachining, thus these could be suitable for portable applications. Additionally, the sensor's performance at exposure to ethanol at various concentrations down to 500 ppb is characterized.

AB - This paper introduces the use of ruthenium dioxide (RuO2) nanosheets as a catalyst in gas sensors, significantly enhancing the chemiresistive response of tin dioxide (SnO2) thin films for ethanol detection. The RuO2-functionalized device, integrated with a microheater for low-power operation, demonstrates a 243% improved response to 10 ppm ethanol compared to that of pristine SnO2. The sensor is operable at 250 with 18 mW power and fabricated with bulk-micromachining, thus these could be suitable for portable applications. Additionally, the sensor's performance at exposure to ethanol at various concentrations down to 500 ppb is characterized.

KW - Chemireistive gas sensor

KW - Ethanol gas detection

KW - Ruthenium dioxide nanosheets

KW - Suspended gas sensor platform

UR - http://www.scopus.com/inward/record.url?scp=85186680088&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85186680088&partnerID=8YFLogxK

U2 - 10.1109/MEMS58180.2024.10439557

DO - 10.1109/MEMS58180.2024.10439557

M3 - Conference contribution

AN - SCOPUS:85186680088

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 863

EP - 866

BT - IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024

Y2 - 21 January 2024 through 25 January 2024

ER -

Park W, Kang Y, Jin X, Lee D, Hwang SJ , Kim J. Improvement in Chemiresistive Response of SnO₂Thin Film by RuO₂-Nanosheets-Functionalization and Its Application to Highly Sensitive Ethanol Sensor. In IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024. Institute of Electrical and Electronics Engineers Inc. 2024. p. 863-866. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS58180.2024.10439557