Abstract
We investigated the effect of adsorption of specific molecules on undoped zinc tin oxide (ZTO) and zirconium (Zr)-doped zinc tin oxide (ZZTO) thin-film transistors (TFTs) using a solution process. The specific chemisorbed species on the back channel region produced unstable ZTO TFT electrical properties under a bias stress test. However, the amount of specific chemisorbed ZTO TFT species could be controlled by Zr doping. As a result, the threshold voltage shift of the ZZTO TFT was dramatically improved comparing the ZTO TFT under positive bias stress.
Original language | English |
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Pages (from-to) | H37-H40 |
Journal | Electrochemical and Solid-State Letters |
Volume | 15 |
Issue number | 2 |
DOIs | |
Publication status | Published - 2012 |
All Science Journal Classification (ASJC) codes
- Chemical Engineering(all)
- Materials Science(all)
- Physical and Theoretical Chemistry
- Electrochemistry
- Electrical and Electronic Engineering