Abstract
Hydrogen sorption characteristics of Zr-based alloy getters were investigated. They were fabricated in the forms of bulk and thin-film, respectively. Hydrogen sorption tests were performed using modified Siverts' apparatus in the pressure range of 10-7 and 10-4 Torr, and at temperatures of 50, 100 °C. In order to improve activation process and hydrogen sorption property, NEGs, with Ni-coated on the surface were employed. Surface Ni plays an important role as catalyst which enables hydrogen to dissociate on surface more easily and protection layer against oxidation. Hydrogen sorption kinetics of Ni-coated NEGs were faster than that of Ni uncoated ones. And Ni-coated NEGs show good gettering performance without activation process. Also, thin-film NEGs were fabricated and characterized to evaluate the applicability for FED.
| Original language | English |
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| Pages | 720-724 |
| Number of pages | 5 |
| Publication status | Published - 1997 |
| Event | Proceedings of the 1997 10th International Vacuum Microelectronics Conference, IVMC'97 - Kyongju, Korea Duration: 1997 Aug 17 → 1997 Aug 21 |
Other
| Other | Proceedings of the 1997 10th International Vacuum Microelectronics Conference, IVMC'97 |
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| City | Kyongju, Korea |
| Period | 97/8/17 → 97/8/21 |
All Science Journal Classification (ASJC) codes
- Surfaces and Interfaces