Abstract
This paper demonstrates a hybrid jetting system (HJS) using both electrohydrodynamic (EHD) force and mechanical actuation to generate ultra fine droplets with drop on demand (DOD). In the proposed HJS, liquid meniscus was formed by a piezoelectric actuator and jets were generated by EHD force. Jetting characteristics were also examined for hydrophobicity and hydrophilicity of a surface of a capillary. With the HJS, on demand jetting of femto-liter was achieved with a frequency of 5 kHz.
Original language | English |
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Article number | 4805426 |
Pages (from-to) | 491-494 |
Number of pages | 4 |
Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
DOIs | |
Publication status | Published - 2009 |
Event | 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: 2009 Jan 25 → 2009 Jan 29 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering