Abstract
This paper reports an integrated inductor-capacitor (LC) resonator structure fabricated using bulk micromachining and anodic bonding technologies. In this resonator structure, pressure change monitored by a capacitive pressure sensor results in the change of resonance frequency. The resonance frequency shift is detected by inductive coupling from an external transmission coil; therefore, pressure can be monitored remotely using the passive LC resonator. The fabricated device size measures 3 mm × 3 mm × 0.6 mm, and pressure responsivity has been estimated to be 2 MHz/mmHg. This micromachined, hermetically sealed structure is suitable for biomedical applications such as intraocular, cardiovascular and brain pressure monitoring.
| Original language | English |
|---|---|
| Pages (from-to) | 7124-7128 |
| Number of pages | 5 |
| Journal | Japanese Journal of Applied Physics |
| Volume | 37 |
| Issue number | 12 B |
| DOIs | |
| Publication status | Published - 1998 |
All Science Journal Classification (ASJC) codes
- Engineering(all)
- Physics and Astronomy(all)