Growth of Al 2O 3-PTFE composite film at room temperature by aerosol deposition method

Sung Hwan Cho; Young Joon Yoon; Hyo Tae Kim; Jihoon Kim; Hyung Jun Kim; Song Min Nam; Hong Koo Baik; Jong Hee Kim

doi:10.1016/j.ceramint.2011.04.066

Growth of Al ₂O ₃-PTFE composite film at room temperature by aerosol deposition method

Sung Hwan Cho, Young Joon Yoon, Hyo Tae Kim, Jihoon Kim, Hyung Jun Kim, Song Min Nam, Hong Koo Baik, Jong Hee Kim

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

To fabricate a ceramic-based substrate for 3-dimensional integration modules with a thick film coating process at room temperature, aerosol deposition method was employed. Al ₂O ₃ was chosen as a main coating material for the requirements of low permittivity and dielectric loss. Especially to give a functionality of plasticity, composite film with polytetrafluoroethylene (PTFE) was also studied. The effects of PTFE, which was incorporated in the film, were investigated by the microstructural characterization. It was confirmed that Al ₂O ₃-PTFE film with the grain size of 100-200 nm were grown at room temperature using Al ₂O ₃-0.5 wt% PTFE mixture powders. Dielectric constant and dielectric loss of Al ₂O ₃-PTFE film were 4.5 and 0.005 at 1 MHz, respectively.

Original language	English
Pages (from-to)	S131-S134
Journal	Ceramics International
Volume	38
Issue number	SUPPL. 1
DOIs	https://doi.org/10.1016/j.ceramint.2011.04.066
Publication status	Published - 2012 Jan

Bibliographical note

Funding Information:
This research was supported by a grant from the Fundamental R&D Program for Core Technology of Materials funded by the Ministry of Knowledge Economy , Republic of Korea.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Process Chemistry and Technology
Surfaces, Coatings and Films
Materials Chemistry

Access to Document

10.1016/j.ceramint.2011.04.066

Cite this

@article{f5924e83617046e0965493fac40953d2,

title = "Growth of Al 2O 3-PTFE composite film at room temperature by aerosol deposition method",

abstract = "To fabricate a ceramic-based substrate for 3-dimensional integration modules with a thick film coating process at room temperature, aerosol deposition method was employed. Al 2O 3 was chosen as a main coating material for the requirements of low permittivity and dielectric loss. Especially to give a functionality of plasticity, composite film with polytetrafluoroethylene (PTFE) was also studied. The effects of PTFE, which was incorporated in the film, were investigated by the microstructural characterization. It was confirmed that Al 2O 3-PTFE film with the grain size of 100-200 nm were grown at room temperature using Al 2O 3-0.5 wt% PTFE mixture powders. Dielectric constant and dielectric loss of Al 2O 3-PTFE film were 4.5 and 0.005 at 1 MHz, respectively.",

author = "Cho, {Sung Hwan} and Yoon, {Young Joon} and Kim, {Hyo Tae} and Jihoon Kim and Kim, {Hyung Jun} and Nam, {Song Min} and Baik, {Hong Koo} and Kim, {Jong Hee}",

note = "Funding Information: This research was supported by a grant from the Fundamental R&D Program for Core Technology of Materials funded by the Ministry of Knowledge Economy , Republic of Korea.",

year = "2012",

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AU - Cho, Sung Hwan

AU - Yoon, Young Joon

AU - Kim, Hyo Tae

AU - Kim, Jihoon

AU - Kim, Hyung Jun

AU - Nam, Song Min

AU - Baik, Hong Koo

AU - Kim, Jong Hee

N1 - Funding Information: This research was supported by a grant from the Fundamental R&D Program for Core Technology of Materials funded by the Ministry of Knowledge Economy , Republic of Korea.

PY - 2012/1

Y1 - 2012/1

N2 - To fabricate a ceramic-based substrate for 3-dimensional integration modules with a thick film coating process at room temperature, aerosol deposition method was employed. Al 2O 3 was chosen as a main coating material for the requirements of low permittivity and dielectric loss. Especially to give a functionality of plasticity, composite film with polytetrafluoroethylene (PTFE) was also studied. The effects of PTFE, which was incorporated in the film, were investigated by the microstructural characterization. It was confirmed that Al 2O 3-PTFE film with the grain size of 100-200 nm were grown at room temperature using Al 2O 3-0.5 wt% PTFE mixture powders. Dielectric constant and dielectric loss of Al 2O 3-PTFE film were 4.5 and 0.005 at 1 MHz, respectively.

AB - To fabricate a ceramic-based substrate for 3-dimensional integration modules with a thick film coating process at room temperature, aerosol deposition method was employed. Al 2O 3 was chosen as a main coating material for the requirements of low permittivity and dielectric loss. Especially to give a functionality of plasticity, composite film with polytetrafluoroethylene (PTFE) was also studied. The effects of PTFE, which was incorporated in the film, were investigated by the microstructural characterization. It was confirmed that Al 2O 3-PTFE film with the grain size of 100-200 nm were grown at room temperature using Al 2O 3-0.5 wt% PTFE mixture powders. Dielectric constant and dielectric loss of Al 2O 3-PTFE film were 4.5 and 0.005 at 1 MHz, respectively.

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