This work demonstrates a highly reliable microelectromechanical (MEM) switch with high switching performance by integrating gold (Au)-decorated carbon nanotube (CNT) network in the contact area. By decorating the CNTs with Au nanoparticles (Au-NPs), we obtained several times extension in the lifetime of the MEM switch with low contact resistance. We verified that the extended lifetime and the low contact resistance originate from the deformable CNTs under mechanical load and the Au NPs with high conductivity at the contact-interface. Our switch also revealed low adhesion force at the contact-interface, which results in highly repeatable and stable actuation voltages at both turn-on and off, whereas typical MEM switches with high adhesion force show irreversible stiction or unstable turn-off voltage. The proposed switch exhibited 1.9 times longer lifetime under hot-switching conditions, compared to previously studied MEM switches based on Au-Au contact.
|Title of host publication||2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019|
|Publisher||Institute of Electrical and Electronics Engineers Inc.|
|Number of pages||4|
|Publication status||Published - 2019 Jan|
|Event||32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of|
Duration: 2019 Jan 27 → 2019 Jan 31
|Name||Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)|
|Conference||32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019|
|Country/Territory||Korea, Republic of|
|Period||19/1/27 → 19/1/31|
Bibliographical noteFunding Information:
This research was supported by the Commercialization Promotion Agency for R&D Outcomes(COMPA) funded by the Ministry of Science and ICT(MSIT) [2018K000285] and the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT)(No. NRF-2018R1A2A1A05023070).
© 2019 IEEE.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering