Gold-Decorated Carbon Nanotube Network as Contact Surface of MEM Switch for Extended Lifetime

Eunhwan Jo; Yong Bok Lee; Jaeyong Lee; Su Bon Kim; Wondo Kim; Min Ho Seo; Jun Bo Yoon; Jongbaeg Kim

doi:10.1109/MEMSYS.2019.8870859

Gold-Decorated Carbon Nanotube Network as Contact Surface of MEM Switch for Extended Lifetime

Eunhwan Jo, Yong Bok Lee, Jaeyong Lee, Su Bon Kim, Wondo Kim, Min Ho Seo, Jun Bo Yoon, Jongbaeg Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

This work demonstrates a highly reliable microelectromechanical (MEM) switch with high switching performance by integrating gold (Au)-decorated carbon nanotube (CNT) network in the contact area. By decorating the CNTs with Au nanoparticles (Au-NPs), we obtained several times extension in the lifetime of the MEM switch with low contact resistance. We verified that the extended lifetime and the low contact resistance originate from the deformable CNTs under mechanical load and the Au NPs with high conductivity at the contact-interface. Our switch also revealed low adhesion force at the contact-interface, which results in highly repeatable and stable actuation voltages at both turn-on and off, whereas typical MEM switches with high adhesion force show irreversible stiction or unstable turn-off voltage. The proposed switch exhibited 1.9 times longer lifetime under hot-switching conditions, compared to previously studied MEM switches based on Au-Au contact.

Original language	English
Title of host publication	2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	958-961
Number of pages	4
ISBN (Electronic)	9781728116105
DOIs	https://doi.org/10.1109/MEMSYS.2019.8870859
Publication status	Published - 2019 Jan
Event	32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of Duration: 2019 Jan 27 → 2019 Jan 31

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2019-January
ISSN (Print)	1084-6999

Conference

Conference	32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
Country/Territory	Korea, Republic of
City	Seoul
Period	19/1/27 → 19/1/31

Bibliographical note

Funding Information:
This research was supported by the Commercialization Promotion Agency for R&D Outcomes(COMPA) funded by the Ministry of Science and ICT(MSIT) [2018K000285] and the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT)(No. NRF-2018R1A2A1A05023070).

Publisher Copyright:
© 2019 IEEE.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2019.8870859

Cite this

Jo, E., Lee, Y. B., Lee, J., Kim, S. B., Kim, W., Seo, M. H., Yoon, J. B., & Kim, J. (2019). Gold-Decorated Carbon Nanotube Network as Contact Surface of MEM Switch for Extended Lifetime. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 958-961). Article 8870859 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2019.8870859

Jo, Eunhwan ; Lee, Yong Bok ; Lee, Jaeyong et al. / Gold-Decorated Carbon Nanotube Network as Contact Surface of MEM Switch for Extended Lifetime. 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 958-961 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{eceefc0141394e9bafc371198382f9e3,

title = "Gold-Decorated Carbon Nanotube Network as Contact Surface of MEM Switch for Extended Lifetime",

abstract = "This work demonstrates a highly reliable microelectromechanical (MEM) switch with high switching performance by integrating gold (Au)-decorated carbon nanotube (CNT) network in the contact area. By decorating the CNTs with Au nanoparticles (Au-NPs), we obtained several times extension in the lifetime of the MEM switch with low contact resistance. We verified that the extended lifetime and the low contact resistance originate from the deformable CNTs under mechanical load and the Au NPs with high conductivity at the contact-interface. Our switch also revealed low adhesion force at the contact-interface, which results in highly repeatable and stable actuation voltages at both turn-on and off, whereas typical MEM switches with high adhesion force show irreversible stiction or unstable turn-off voltage. The proposed switch exhibited 1.9 times longer lifetime under hot-switching conditions, compared to previously studied MEM switches based on Au-Au contact.",

author = "Eunhwan Jo and Lee, {Yong Bok} and Jaeyong Lee and Kim, {Su Bon} and Wondo Kim and Seo, {Min Ho} and Yoon, {Jun Bo} and Jongbaeg Kim",

note = "Funding Information: This research was supported by the Commercialization Promotion Agency for R&D Outcomes(COMPA) funded by the Ministry of Science and ICT(MSIT) [2018K000285] and the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT)(No. NRF-2018R1A2A1A05023070). Publisher Copyright: {\textcopyright} 2019 IEEE.; 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 ; Conference date: 27-01-2019 Through 31-01-2019",

year = "2019",

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doi = "10.1109/MEMSYS.2019.8870859",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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Jo, E, Lee, YB, Lee, J, Kim, SB, Kim, W, Seo, MH, Yoon, JB & Kim, J 2019, Gold-Decorated Carbon Nanotube Network as Contact Surface of MEM Switch for Extended Lifetime. in 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019., 8870859, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2019-January, Institute of Electrical and Electronics Engineers Inc., pp. 958-961, 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019, Seoul, Korea, Republic of, 19/1/27. https://doi.org/10.1109/MEMSYS.2019.8870859

Gold-Decorated Carbon Nanotube Network as Contact Surface of MEM Switch for Extended Lifetime. / Jo, Eunhwan; Lee, Yong Bok; Lee, Jaeyong et al.
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. p. 958-961 8870859 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Jo, Eunhwan

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AU - Lee, Jaeyong

AU - Kim, Su Bon

AU - Kim, Wondo

AU - Seo, Min Ho

AU - Yoon, Jun Bo

AU - Kim, Jongbaeg

N1 - Funding Information: This research was supported by the Commercialization Promotion Agency for R&D Outcomes(COMPA) funded by the Ministry of Science and ICT(MSIT) [2018K000285] and the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT)(No. NRF-2018R1A2A1A05023070). Publisher Copyright: © 2019 IEEE.

PY - 2019/1

Y1 - 2019/1

N2 - This work demonstrates a highly reliable microelectromechanical (MEM) switch with high switching performance by integrating gold (Au)-decorated carbon nanotube (CNT) network in the contact area. By decorating the CNTs with Au nanoparticles (Au-NPs), we obtained several times extension in the lifetime of the MEM switch with low contact resistance. We verified that the extended lifetime and the low contact resistance originate from the deformable CNTs under mechanical load and the Au NPs with high conductivity at the contact-interface. Our switch also revealed low adhesion force at the contact-interface, which results in highly repeatable and stable actuation voltages at both turn-on and off, whereas typical MEM switches with high adhesion force show irreversible stiction or unstable turn-off voltage. The proposed switch exhibited 1.9 times longer lifetime under hot-switching conditions, compared to previously studied MEM switches based on Au-Au contact.

AB - This work demonstrates a highly reliable microelectromechanical (MEM) switch with high switching performance by integrating gold (Au)-decorated carbon nanotube (CNT) network in the contact area. By decorating the CNTs with Au nanoparticles (Au-NPs), we obtained several times extension in the lifetime of the MEM switch with low contact resistance. We verified that the extended lifetime and the low contact resistance originate from the deformable CNTs under mechanical load and the Au NPs with high conductivity at the contact-interface. Our switch also revealed low adhesion force at the contact-interface, which results in highly repeatable and stable actuation voltages at both turn-on and off, whereas typical MEM switches with high adhesion force show irreversible stiction or unstable turn-off voltage. The proposed switch exhibited 1.9 times longer lifetime under hot-switching conditions, compared to previously studied MEM switches based on Au-Au contact.

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BT - 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019

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ER -

Jo E, Lee YB, Lee J, Kim SB, Kim W, Seo MH et al. Gold-Decorated Carbon Nanotube Network as Contact Surface of MEM Switch for Extended Lifetime. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc. 2019. p. 958-961. 8870859. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2019.8870859

Gold-Decorated Carbon Nanotube Network as Contact Surface of MEM Switch for Extended Lifetime

Abstract

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