Abstract
A method to fabricate vitreous carbon (VC) stamp was proposed for glass molding of micro/nano-scale components. A VC nanostamp having a nanograting cavity with a pitch of ~380 nm and a height of ~150 nm was fabricated by carbonization of nano replicated furan precursor having a nanograting structure with a pitch of 500 nm and height of 230 nm. A glass nanograting structure with a pitch of ~380 nm was fabricated by glass molding with the VC stamp. To examine the feasibility of the proposed method, the thermal stability of photonic crystal optical filters composed of glass moulded nanograting and physical vapor deposited TiO2 layer was evaluated.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 13th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2013 |
| Editors | R. Leach, Paul Shore |
| Publisher | euspen |
| Pages | 356-359 |
| Number of pages | 4 |
| Volume | 2 |
| ISBN (Electronic) | 9780956679024 |
| Publication status | Published - 2013 |
| Event | 13th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2013 - Berlin, Germany Duration: 2013 May 27 → 2013 May 31 |
Other
| Other | 13th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2013 |
|---|---|
| Country/Territory | Germany |
| City | Berlin |
| Period | 13/5/27 → 13/5/31 |
All Science Journal Classification (ASJC) codes
- Mechanical Engineering
- Materials Science(all)
- Environmental Engineering
- Industrial and Manufacturing Engineering
- Instrumentation