Fundamental investigation of micro wear rate using an atomic force microscope

Koo Hyun Chung; Dae Eun Kim

doi:10.1023/A:1024457132574

Fundamental investigation of micro wear rate using an atomic force microscope

Koo Hyun Chung, Dae Eun Kim

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

92 Citations (Scopus)

Abstract

Micro-wear characteristics of Si and Si₃N₄ tips and the surfaces of Au, Cu, DLC, and bare Si were investigated using an Atomic Force Microscope (AFM). The range of applied load was between 10 to 800 nN. It was found that the wear coefficient values were between 10^-3 to 10^-1 and 10^-5 to 10^-4 for Si and Si ₃N₄ tip, respectively. The experimentally obtained wear rates were comparable to those of the macro-scale systems. Also, evidence of micro-plastic deformation could be found on the wear track.

Original language	English
Pages (from-to)	135-144
Number of pages	10
Journal	Tribology Letters
Volume	15
Issue number	2
DOIs	https://doi.org/10.1023/A:1024457132574
Publication status	Published - 2003 Aug

Bibliographical note

Funding Information:
This work was supported by the Korea Ministry of Science & Technology through the National R&D program (No. M1-0214-00-0199) and the authors are grateful for the support.

All Science Journal Classification (ASJC) codes

Mechanics of Materials
Mechanical Engineering
Surfaces and Interfaces
Surfaces, Coatings and Films

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title = "Fundamental investigation of micro wear rate using an atomic force microscope",

abstract = "Micro-wear characteristics of Si and Si3N4 tips and the surfaces of Au, Cu, DLC, and bare Si were investigated using an Atomic Force Microscope (AFM). The range of applied load was between 10 to 800 nN. It was found that the wear coefficient values were between 10-3 to 10-1 and 10-5 to 10-4 for Si and Si 3N4 tip, respectively. The experimentally obtained wear rates were comparable to those of the macro-scale systems. Also, evidence of micro-plastic deformation could be found on the wear track.",

author = "Chung, {Koo Hyun} and Kim, {Dae Eun}",

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N2 - Micro-wear characteristics of Si and Si3N4 tips and the surfaces of Au, Cu, DLC, and bare Si were investigated using an Atomic Force Microscope (AFM). The range of applied load was between 10 to 800 nN. It was found that the wear coefficient values were between 10-3 to 10-1 and 10-5 to 10-4 for Si and Si 3N4 tip, respectively. The experimentally obtained wear rates were comparable to those of the macro-scale systems. Also, evidence of micro-plastic deformation could be found on the wear track.

AB - Micro-wear characteristics of Si and Si3N4 tips and the surfaces of Au, Cu, DLC, and bare Si were investigated using an Atomic Force Microscope (AFM). The range of applied load was between 10 to 800 nN. It was found that the wear coefficient values were between 10-3 to 10-1 and 10-5 to 10-4 for Si and Si 3N4 tip, respectively. The experimentally obtained wear rates were comparable to those of the macro-scale systems. Also, evidence of micro-plastic deformation could be found on the wear track.

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Fundamental investigation of micro wear rate using an atomic force microscope

Abstract

Bibliographical note

All Science Journal Classification (ASJC) codes

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