Fundamental investigation of micro wear rate using an atomic force microscope

Koo Hyun Chung, Dae Eun Kim

Research output: Contribution to journalArticlepeer-review

92 Citations (Scopus)


Micro-wear characteristics of Si and Si3N4 tips and the surfaces of Au, Cu, DLC, and bare Si were investigated using an Atomic Force Microscope (AFM). The range of applied load was between 10 to 800 nN. It was found that the wear coefficient values were between 10-3 to 10-1 and 10-5 to 10-4 for Si and Si 3N4 tip, respectively. The experimentally obtained wear rates were comparable to those of the macro-scale systems. Also, evidence of micro-plastic deformation could be found on the wear track.

Original languageEnglish
Pages (from-to)135-144
Number of pages10
JournalTribology Letters
Issue number2
Publication statusPublished - 2003 Aug

Bibliographical note

Funding Information:
This work was supported by the Korea Ministry of Science & Technology through the National R&D program (No. M1-0214-00-0199) and the authors are grateful for the support.

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Mechanical Engineering
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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