Fully integrated low phase-noise VCOs with on-chip MEMS inductors

Eun Chul Park; Yun Seok Choi; Jun Bo Yoon; Songcheol Hong; Euisik Yoon

doi:10.1109/TMTT.2002.806510

Fully integrated low phase-noise VCOs with on-chip MEMS inductors

Eun Chul Park, Yun Seok Choi, Jun Bo Yoon, Songcheol Hong, Euisik Yoon

Yonsei Advanced Science Institute

Research output: Contribution to journal › Article › peer-review

64 Citations (Scopus)

Abstract

We present fully integrated high-performance voltage-controlled oscillators (VCOs) with on-chip microelectromechanical system (MEMS) inductors for the first time. MEMS inductors have been realized from the unique CMOS-compatible MEMS process that we have developed to provide suspended thick metal structures for high-quality (Q) factors. Fully integrated CMOS VCOs have been fabricated by monolithically integrating these MEMS inductors on the top of the CMOS active circuits realized by the TSMC 0.18-μm mixed-mode CMOS process. Low phase noise has been achieved as -124 and -117 dBc/Hz at 300-kHz offset from carrier frequencies of 1 and 2.6 GHz, respectively, in the fabricated single-chip VCOs.

Original language	English
Pages (from-to)	289-296
Number of pages	8
Journal	IEEE Transactions on Microwave Theory and Techniques
Volume	51
Issue number	1 II
DOIs	https://doi.org/10.1109/TMTT.2002.806510
Publication status	Published - 2003 Jan

Bibliographical note

Funding Information:
Manuscript received April 24, 2002. This work was supported in part by the Ministry of Science and Technology under the Frontier 21 Program and by the Ministry of Education and Human Resource Development, Korea, under the BK 21 Program.

All Science Journal Classification (ASJC) codes

Radiation
Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1109/TMTT.2002.806510

Cite this

@article{51b8e8152e2d4fefaea7ebe52f5e25f5,

title = "Fully integrated low phase-noise VCOs with on-chip MEMS inductors",

abstract = "We present fully integrated high-performance voltage-controlled oscillators (VCOs) with on-chip microelectromechanical system (MEMS) inductors for the first time. MEMS inductors have been realized from the unique CMOS-compatible MEMS process that we have developed to provide suspended thick metal structures for high-quality (Q) factors. Fully integrated CMOS VCOs have been fabricated by monolithically integrating these MEMS inductors on the top of the CMOS active circuits realized by the TSMC 0.18-μm mixed-mode CMOS process. Low phase noise has been achieved as -124 and -117 dBc/Hz at 300-kHz offset from carrier frequencies of 1 and 2.6 GHz, respectively, in the fabricated single-chip VCOs.",

author = "Park, {Eun Chul} and Choi, {Yun Seok} and Yoon, {Jun Bo} and Songcheol Hong and Euisik Yoon",

note = "Funding Information: Manuscript received April 24, 2002. This work was supported in part by the Ministry of Science and Technology under the Frontier 21 Program and by the Ministry of Education and Human Resource Development, Korea, under the BK 21 Program.",

year = "2003",

month = jan,

doi = "10.1109/TMTT.2002.806510",

language = "English",

volume = "51",

pages = "289--296",

journal = "IEEE Transactions on Microwave Theory and Techniques",

issn = "0018-9480",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "1 II",

}

TY - JOUR

T1 - Fully integrated low phase-noise VCOs with on-chip MEMS inductors

AU - Park, Eun Chul

AU - Choi, Yun Seok

AU - Yoon, Jun Bo

AU - Hong, Songcheol

AU - Yoon, Euisik

N1 - Funding Information: Manuscript received April 24, 2002. This work was supported in part by the Ministry of Science and Technology under the Frontier 21 Program and by the Ministry of Education and Human Resource Development, Korea, under the BK 21 Program.

PY - 2003/1

Y1 - 2003/1

N2 - We present fully integrated high-performance voltage-controlled oscillators (VCOs) with on-chip microelectromechanical system (MEMS) inductors for the first time. MEMS inductors have been realized from the unique CMOS-compatible MEMS process that we have developed to provide suspended thick metal structures for high-quality (Q) factors. Fully integrated CMOS VCOs have been fabricated by monolithically integrating these MEMS inductors on the top of the CMOS active circuits realized by the TSMC 0.18-μm mixed-mode CMOS process. Low phase noise has been achieved as -124 and -117 dBc/Hz at 300-kHz offset from carrier frequencies of 1 and 2.6 GHz, respectively, in the fabricated single-chip VCOs.

AB - We present fully integrated high-performance voltage-controlled oscillators (VCOs) with on-chip microelectromechanical system (MEMS) inductors for the first time. MEMS inductors have been realized from the unique CMOS-compatible MEMS process that we have developed to provide suspended thick metal structures for high-quality (Q) factors. Fully integrated CMOS VCOs have been fabricated by monolithically integrating these MEMS inductors on the top of the CMOS active circuits realized by the TSMC 0.18-μm mixed-mode CMOS process. Low phase noise has been achieved as -124 and -117 dBc/Hz at 300-kHz offset from carrier frequencies of 1 and 2.6 GHz, respectively, in the fabricated single-chip VCOs.

UR - http://www.scopus.com/inward/record.url?scp=0037256878&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0037256878&partnerID=8YFLogxK

U2 - 10.1109/TMTT.2002.806510

DO - 10.1109/TMTT.2002.806510

M3 - Article

AN - SCOPUS:0037256878

SN - 0018-9480

VL - 51

SP - 289

EP - 296

JO - IEEE Transactions on Microwave Theory and Techniques

JF - IEEE Transactions on Microwave Theory and Techniques

IS - 1 II

ER -

Fully integrated low phase-noise VCOs with on-chip MEMS inductors

Abstract

Bibliographical note

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this