Fully integrated low phase-noise VCOs with on-chip MEMS inductors

Eun Chul Park, Yun Seok Choi, Jun Bo Yoon, Songcheol Hong, Euisik Yoon

Research output: Contribution to journalArticlepeer-review

64 Citations (Scopus)


We present fully integrated high-performance voltage-controlled oscillators (VCOs) with on-chip microelectromechanical system (MEMS) inductors for the first time. MEMS inductors have been realized from the unique CMOS-compatible MEMS process that we have developed to provide suspended thick metal structures for high-quality (Q) factors. Fully integrated CMOS VCOs have been fabricated by monolithically integrating these MEMS inductors on the top of the CMOS active circuits realized by the TSMC 0.18-μm mixed-mode CMOS process. Low phase noise has been achieved as -124 and -117 dBc/Hz at 300-kHz offset from carrier frequencies of 1 and 2.6 GHz, respectively, in the fabricated single-chip VCOs.

Original languageEnglish
Pages (from-to)289-296
Number of pages8
JournalIEEE Transactions on Microwave Theory and Techniques
Issue number1 II
Publication statusPublished - 2003 Jan

Bibliographical note

Funding Information:
Manuscript received April 24, 2002. This work was supported in part by the Ministry of Science and Technology under the Frontier 21 Program and by the Ministry of Education and Human Resource Development, Korea, under the BK 21 Program.

All Science Journal Classification (ASJC) codes

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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