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Formation of Functional Conductive Carbon Coating on Si by C60 Ion Beam
Vladimir Pukha, Julia Popova, Mahdi Khadem, Dae Eun Kim, Igor Khodos, Alexander Shakhmin, Maxim Mishin, Kirill Krainov, Andrei Titov, Platon Karaseov
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
3
Citations
(Scopus)