Formation of Functional Conductive Carbon Coating on Si by C60 Ion Beam

Vladimir Pukha, Julia Popova, Mahdi Khadem, Dae Eun Kim, Igor Khodos, Alexander Shakhmin, Maxim Mishin, Kirill Krainov, Andrei Titov, Platon Karaseov

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

We report new carbon-based coating that can be utilysed as a hard chemically inert highly condictive transparent blanket for electrodes and moving parts in a wide range of electronic and MEMS applications. Diamond-like carbon film was grown on (100) n-Si substrate by accelerated C60 ion beam irradiation. Ion energy was kept at 5 and 8 keV, substrate temperature was varied in the range 100–400 ℃. Irradiation with 5 keV beam results in growth of carbon films at all temperatures used. Films are amorphous with high amount of sp3-bonded carbon atoms. Graphite nanocrystals of ~1.5 nm in size were found in the coatings grown at 400 ℃. 8 keV beam sputters the Si target at 100 and 200 ℃, while bombardment at higher temperatures (300 and 400 ℃) results in carbon film growth. Graphite nano-crystal formation is much less pronounced at this energy. In all cases, silicon carbide interlayer is formed at the substrate-coating interface due to the ion-beam mixing effect, which results in a good adhesion of the coating. Electric resistivity of coating obtained with 8 keV ions at Ts = 400 ℃ is 1.5 × 10−4 Ω × m, whereas 5 keV ions at same Ts = 400 ℃ gives 9 × 10−4 Ω × m.

Original languageEnglish
Title of host publicationInternational Youth Conference on Electronics, Telecommunications and Information Technologies - Proceedings of the YETI 2020
EditorsElena Velichko, Maksim Vinnichenko, Victoria Kapralova, Yevgeni Koucheryavy
PublisherSpringer Science and Business Media Deutschland GmbH
Pages131-139
Number of pages9
ISBN (Print)9783030588670
DOIs
Publication statusPublished - 2021
EventInternational Youth Conference on Electronics, Telecommunications and Information Technologies, YETI 2020 - St. Petersburg, Russian Federation
Duration: 2020 Jul 102020 Jul 11

Publication series

NameSpringer Proceedings in Physics
Volume255
ISSN (Print)0930-8989
ISSN (Electronic)1867-4941

Conference

ConferenceInternational Youth Conference on Electronics, Telecommunications and Information Technologies, YETI 2020
Country/TerritoryRussian Federation
CitySt. Petersburg
Period20/7/1020/7/11

Bibliographical note

Publisher Copyright:
© 2021, Springer Nature Switzerland AG.

All Science Journal Classification (ASJC) codes

  • General Physics and Astronomy

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