Feasibility study of barium fluoride films as a sacrificial layer for patterning of ZnO nanowire arrays

J. P. Kar, J. H. Choi, J. M. Myoung

Research output: Contribution to journalArticlepeer-review


Vertical aligned ZnO nanowires were grown by metal-organic chemical vapor deposition technique on Si substrate. X-ray diffraction patterns and the high-resolution transmission electron microscopy confirmed the single crystalline growth of the ZnO nanowires along [0 0 0 1] direction. In another experiment, BaF2 films were deposited on silicon substrate by thermal evaporation. The BaF2 films show polycrystalline nature along with a granular surface morphology. Based on the solubility of BaF2 film in cold water, BaF2 layer was used as a sacrificial layer for the patterning of ZnO nanowire arrays. A sharp edge was obtained between the hexagonal pattern and the surrounding nanowires, which is suitable for micropatterning of ZnO nanowires for electronic devices.

Original languageEnglish
Pages (from-to)2372-2376
Number of pages5
JournalJournal of Crystal Growth
Issue number8
Publication statusPublished - 2009 Apr 1

Bibliographical note

Funding Information:
This work was supported by the IT R&D Program of MKE/IITA (2008-F-023-01, Next generation future device fabricated by using nanojunction) and by Samsung Electronics Co. Ltd. (2008-8-2105). This work was also supported by the Second Stage of Brain Korea 21 Project in 2008.

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry


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