Fabrication of sub 50-nm direct-patterned Pb(Zr,Ti)O3 films by electron beam-induced metal-organic deposition

Hyeong Ho Park; Hong Sub Lee; Hyung Ho Park; Xin Zhang; Ross H. Hill

doi:10.1007/s10832-008-9560-9

Fabrication of sub 50-nm direct-patterned Pb(Zr,Ti)O₃ films by electron beam-induced metal-organic deposition

Hyeong Ho Park, Hong Sub Lee, Hyung Ho Park, Xin Zhang, Ross H. Hill

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

Direct-patterned lead zirconate titanate (PZT) films prepared from an electron beam sensitive stock solution were investigated for advanced stage applications in sub 50-nm patterned systems. The required electron beam dose for the direct-patterning of PZT precursor films was 4.5 mC/cm². The PZT precursor films with pattern size of 500×500 μm² were exposed to an electron beam for 2 h and annealed at 400°C for 30 min under an O₂ ambient. After exposure and annealing, values of the remnant polarization and coercive field were 7.0 μC/cm² and 97 kV/cm at 10 V, respectively. These results suggest a possible application of PZT films in micro- or nanoelectromechanical systems.

Original language	English
Pages (from-to)	214-218
Number of pages	5
Journal	Journal of Electroceramics
Volume	24
Issue number	3
DOIs	https://doi.org/10.1007/s10832-008-9560-9
Publication status	Published - 2010 May

Bibliographical note

Funding Information:
Acknowledgements This work was supported by the Korea Research Foundation Grant funded by the Korean Government (MOEHRD, Basic Research Promotion Fund) (KRF-2006-311-D00636). The experiments performed at the PLS were supported in part by the MOST and the POSTECH.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Condensed Matter Physics
Mechanics of Materials
Electrical and Electronic Engineering
Materials Chemistry

Access to Document

10.1007/s10832-008-9560-9

Cite this

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title = "Fabrication of sub 50-nm direct-patterned Pb(Zr,Ti)O3 films by electron beam-induced metal-organic deposition",

abstract = "Direct-patterned lead zirconate titanate (PZT) films prepared from an electron beam sensitive stock solution were investigated for advanced stage applications in sub 50-nm patterned systems. The required electron beam dose for the direct-patterning of PZT precursor films was 4.5 mC/cm2. The PZT precursor films with pattern size of 500×500 μm2 were exposed to an electron beam for 2 h and annealed at 400°C for 30 min under an O2 ambient. After exposure and annealing, values of the remnant polarization and coercive field were 7.0 μC/cm2 and 97 kV/cm at 10 V, respectively. These results suggest a possible application of PZT films in micro- or nanoelectromechanical systems.",

author = "Park, {Hyeong Ho} and Lee, {Hong Sub} and Park, {Hyung Ho} and Xin Zhang and Hill, {Ross H.}",

note = "Funding Information: Acknowledgements This work was supported by the Korea Research Foundation Grant funded by the Korean Government (MOEHRD, Basic Research Promotion Fund) (KRF-2006-311-D00636). The experiments performed at the PLS were supported in part by the MOST and the POSTECH.",

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AU - Zhang, Xin

AU - Hill, Ross H.

N1 - Funding Information: Acknowledgements This work was supported by the Korea Research Foundation Grant funded by the Korean Government (MOEHRD, Basic Research Promotion Fund) (KRF-2006-311-D00636). The experiments performed at the PLS were supported in part by the MOST and the POSTECH.

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N2 - Direct-patterned lead zirconate titanate (PZT) films prepared from an electron beam sensitive stock solution were investigated for advanced stage applications in sub 50-nm patterned systems. The required electron beam dose for the direct-patterning of PZT precursor films was 4.5 mC/cm2. The PZT precursor films with pattern size of 500×500 μm2 were exposed to an electron beam for 2 h and annealed at 400°C for 30 min under an O2 ambient. After exposure and annealing, values of the remnant polarization and coercive field were 7.0 μC/cm2 and 97 kV/cm at 10 V, respectively. These results suggest a possible application of PZT films in micro- or nanoelectromechanical systems.

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