Direct-patterned lead zirconate titanate (PZT) films prepared from an electron beam sensitive stock solution were investigated for advanced stage applications in sub 50-nm patterned systems. The required electron beam dose for the direct-patterning of PZT precursor films was 4.5 mC/cm2. The PZT precursor films with pattern size of 500×500 μm2 were exposed to an electron beam for 2 h and annealed at 400°C for 30 min under an O2 ambient. After exposure and annealing, values of the remnant polarization and coercive field were 7.0 μC/cm2 and 97 kV/cm at 10 V, respectively. These results suggest a possible application of PZT films in micro- or nanoelectromechanical systems.
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Acknowledgements This work was supported by the Korea Research Foundation Grant funded by the Korean Government (MOEHRD, Basic Research Promotion Fund) (KRF-2006-311-D00636). The experiments performed at the PLS were supported in part by the MOST and the POSTECH.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Ceramics and Composites
- Condensed Matter Physics
- Mechanics of Materials
- Electrical and Electronic Engineering
- Materials Chemistry