Fabrication of piezoresistive Si nanorod-based pressure sensor arrays: A promising candidate for portable breath monitoring devices

Engineering

• Pressure Probe 100%
• Fabrication 60%
• Sensor Array 60%
• Detection 40%
• High Sensitivity 40%
• Piezoresistive Sensor 40%
• Electronics 40%
• Applied Pressure 20%
• Promising Candidate 20%
• High Aspect Ratio 20%
• Bias Voltage 20%
• Leading Edge 20%
• Health Care 20%
• Sensing Performance 20%
• Realization 20%
• Monitoring Device 20%
• Large Area 20%
• Applications 20%
• Stability 20%
• Properties 20%
• Cycles 20%
• Low Pressure 20%
• Breathing 20%

Chemistry

• Nanorod 100%
• Pressure Sensor 100%
• Gas Flow 60%
• Nanomaterial 40%
• Pressure 40%
• Device 40%
• Sensor 40%
• Noble Gas Atom 20%
• Procedure 20%
• Configuration 20%
• Application 20%
• Dimension 20%
• Respiratory 20%

Material Science

• Nanocrystalline Material 40%
• Nanostructured Material 20%
• Durability 20%
• Inert Gas 20%