Fabrication of inorganic-organic hybrid films for optical waveguide

Sunho Jeong, Jooho Moon

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)


Inorganic-organic hybrid guiding and buffer layers for optical waveguides were synthesized by the sol-gel process. An acid-catalyzed solution of 3-(trimethoxysilyl)propylmethacrylate and tetraethylorthosilicate was used as a precursor to produce thick films by spin-coating. Incorporation of a UV-sensitive functional group leads to the fabrication of the photo-patternable guiding layer. High-resolution patterned films with 8 μm linewidth were obtained using a conventional photo-lithography. Furthermore, the amount of phenyltrimethoxysilane added as a refractive index modifier varied in order to control the refractive index of the underlying buffer layer. The refractive index variations and structural changes of these inorganic-organic hybrid films as a function of the processing conditions were analyzed using the prism coupling technique and a Fourier transform infrared spectrometer. We have produced optically transparent films at above 500 nm with a propagation loss of 0.84 and 1.49 dB/cm at 1310 and 1550 nm, respectively.

Original languageEnglish
Pages (from-to)3530-3535
Number of pages6
JournalJournal of Non-Crystalline Solids
Issue number43-45
Publication statusPublished - 2005 Nov 1

Bibliographical note

Funding Information:
This work was supported by the National Research Laboratory (NRL) Program from the Korea Science and Engineering Foundation.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Materials Chemistry


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