Fabrication of diffractive optical elements with grayscale photo-lithography

Wan Chin Kim; Myung Bok Lee; Jin Seung Sohn; Eun Hyung Cho; Chan Young Yoon; No Cheol Park; Young Pil Park

doi:10.1117/12.556684

Fabrication of diffractive optical elements with grayscale photo-lithography

Wan Chin Kim, Myung Bok Lee, Jin Seung Sohn, Eun Hyung Cho, Chan Young Yoon, No Cheol Park, Young Pil Park

Department of Mechanical Engineering

Research output: Contribution to journal › Conference article › peer-review

Abstract

We have developed diffractive optical element (DOE) to compensate chromatic aberration happened in aspheric lens surfaces in micro optical system. The DOE was generated with grayscale lithography using high-energy-beam-sensitive (HEBS)-glass, and we finally get DOEs having 4levels and 8levels through this fabrication.

Original language	English
Pages (from-to)	686-696
Number of pages	11
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5380
DOIs	https://doi.org/10.1117/12.556684
Publication status	Published - 2004
Event	Optical Data Storage 2004 - Monterey, CA, United States Duration: 2004 Apr 18 → 2004 Apr 21

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.556684

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title = "Fabrication of diffractive optical elements with grayscale photo-lithography",

abstract = "We have developed diffractive optical element (DOE) to compensate chromatic aberration happened in aspheric lens surfaces in micro optical system. The DOE was generated with grayscale lithography using high-energy-beam-sensitive (HEBS)-glass, and we finally get DOEs having 4levels and 8levels through this fabrication.",

author = "Kim, {Wan Chin} and Lee, {Myung Bok} and Sohn, {Jin Seung} and Cho, {Eun Hyung} and Yoon, {Chan Young} and Park, {No Cheol} and Park, {Young Pil}",

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journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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AU - Kim, Wan Chin

AU - Lee, Myung Bok

AU - Sohn, Jin Seung

AU - Cho, Eun Hyung

AU - Yoon, Chan Young

AU - Park, No Cheol

AU - Park, Young Pil

PY - 2004

Y1 - 2004

N2 - We have developed diffractive optical element (DOE) to compensate chromatic aberration happened in aspheric lens surfaces in micro optical system. The DOE was generated with grayscale lithography using high-energy-beam-sensitive (HEBS)-glass, and we finally get DOEs having 4levels and 8levels through this fabrication.

AB - We have developed diffractive optical element (DOE) to compensate chromatic aberration happened in aspheric lens surfaces in micro optical system. The DOE was generated with grayscale lithography using high-energy-beam-sensitive (HEBS)-glass, and we finally get DOEs having 4levels and 8levels through this fabrication.

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DO - 10.1117/12.556684

M3 - Conference article

AN - SCOPUS:10044222260

SN - 0277-786X

VL - 5380

SP - 686

EP - 696

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Optical Data Storage 2004

Y2 - 18 April 2004 through 21 April 2004

ER -

Fabrication of diffractive optical elements with grayscale photo-lithography

Abstract

All Science Journal Classification (ASJC) codes

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