Fabrication of Au thin film gratings by pulsed laser interference

Hyunkwon Shin, Hyeonggeun Yoo, Myeongkyu Lee

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)


We report that one-dimensional (1D) and two-dimensional (2D) metal thin film gratings can be directly fabricated by interfering Nd-YAG pulsed laser beams (wavelength = 1064 nm, pulse width = 6 ns) incident from the backside of glass substrate. This process utilizes a laser-induced thermo-elastic force which plays a role to detach the film from the substrate. Micro-scale Au transmission gratings with a minimum feature size of 1 μm could be generated by interference-driven periodic detachment. The fabrication of tube-structured patterns as well as stripes was also possible by adjusting the pulse power and this is explained with the effect of film cohesion.

Original languageEnglish
Pages (from-to)2944-2947
Number of pages4
JournalApplied Surface Science
Issue number9
Publication statusPublished - 2010 Feb 15

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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