Fabrication of a novel nano-probe slide for near-field optical microscopy

Sang Youp Yim, Eunhee Jeang, Jae Hoon Lee, Seung Han Park, Kyuman Cho

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)


A novel probe structure, which can act as a planar nano-probe slide for near-field microscopy, was proposed and fabricated. Sub-wavelength apertures on a Si substrate are successfully produced by means of standard photolithography techniques with properly selected masks. In particular, the anisotropic etching characteristics of Si substrate and the hardness of the Si3N 4 film are utilized. Probe-to-probe scanning of the fabricated near-field nano-probe slide shows sub-wavelength confinement of light and comparable throughput to the conventional optical fiber probe. We also show that the nano-probe slide can serve as a supporting base and a sub-wavelength aperture to obtain the near-field photoluminescence spectra of a limited number of CdSe nanocrystals.

Original languageEnglish
Pages (from-to)1060-1064
Number of pages5
JournalJournal of the Korean Physical Society
Issue number4
Publication statusPublished - 2004 Oct

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)


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