Fabrication and characterization of monolithic piezoresistive high-g three-axis accelerometer

Han Il Jung; Dae Sung Kwon; Jongbaeg Kim

doi:10.1186/s40486-016-0041-7

Fabrication and characterization of monolithic piezoresistive high-g three-axis accelerometer

Han Il Jung, Dae Sung Kwon, Jongbaeg Kim

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

We report piezoresistive high-g three-axis accelerometer with a single proof mass suspended by thin eight beams. This eight-beam design allows load-sharing at high-g preventing structural breakage, as well as the symmetric arrangement of piezoresistors. The device chip size is 1.4 mm × 1.4 mm × 0.51 mm. Experimental results show that the sensitivity in X-, Y- and Z-axes are 0.2433, 0.1308 and 0.3068 mV/g/V under 5 V applied and the resolutions are 24.2, 29.9 and 25.4 g, respectively.

Original language	English
Article number	7
Journal	Micro and Nano Systems Letters
Volume	5
Issue number	1
DOIs	https://doi.org/10.1186/s40486-016-0041-7
Publication status	Published - 2017 Dec 1

Bibliographical note

Publisher Copyright:
© 2017, The Author(s).

All Science Journal Classification (ASJC) codes

Biomaterials
Biomedical Engineering

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10.1186/s40486-016-0041-7

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@article{598878c5847b4492a68565594ca9823b,

title = "Fabrication and characterization of monolithic piezoresistive high-g three-axis accelerometer",

abstract = "We report piezoresistive high-g three-axis accelerometer with a single proof mass suspended by thin eight beams. This eight-beam design allows load-sharing at high-g preventing structural breakage, as well as the symmetric arrangement of piezoresistors. The device chip size is 1.4 mm × 1.4 mm × 0.51 mm. Experimental results show that the sensitivity in X-, Y- and Z-axes are 0.2433, 0.1308 and 0.3068 mV/g/V under 5 V applied and the resolutions are 24.2, 29.9 and 25.4 g, respectively.",

author = "Jung, {Han Il} and Kwon, {Dae Sung} and Jongbaeg Kim",

note = "Publisher Copyright: {\textcopyright} 2017, The Author(s).",

year = "2017",

month = dec,

day = "1",

doi = "10.1186/s40486-016-0041-7",

language = "English",

volume = "5",

journal = "Micro and Nano Systems Letters",

issn = "2213-9621",

publisher = "Springer Open",

number = "1",

}

TY - JOUR

T1 - Fabrication and characterization of monolithic piezoresistive high-g three-axis accelerometer

AU - Jung, Han Il

AU - Kwon, Dae Sung

AU - Kim, Jongbaeg

PY - 2017/12/1

Y1 - 2017/12/1

N2 - We report piezoresistive high-g three-axis accelerometer with a single proof mass suspended by thin eight beams. This eight-beam design allows load-sharing at high-g preventing structural breakage, as well as the symmetric arrangement of piezoresistors. The device chip size is 1.4 mm × 1.4 mm × 0.51 mm. Experimental results show that the sensitivity in X-, Y- and Z-axes are 0.2433, 0.1308 and 0.3068 mV/g/V under 5 V applied and the resolutions are 24.2, 29.9 and 25.4 g, respectively.

AB - We report piezoresistive high-g three-axis accelerometer with a single proof mass suspended by thin eight beams. This eight-beam design allows load-sharing at high-g preventing structural breakage, as well as the symmetric arrangement of piezoresistors. The device chip size is 1.4 mm × 1.4 mm × 0.51 mm. Experimental results show that the sensitivity in X-, Y- and Z-axes are 0.2433, 0.1308 and 0.3068 mV/g/V under 5 V applied and the resolutions are 24.2, 29.9 and 25.4 g, respectively.

UR - http://www.scopus.com/inward/record.url?scp=85047613815&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85047613815&partnerID=8YFLogxK

U2 - 10.1186/s40486-016-0041-7

DO - 10.1186/s40486-016-0041-7

M3 - Article

AN - SCOPUS:85047613815

SN - 2213-9621

VL - 5

JO - Micro and Nano Systems Letters

JF - Micro and Nano Systems Letters

IS - 1

M1 - 7

ER -

Fabrication and characterization of monolithic piezoresistive high-g three-axis accelerometer

Abstract

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