Fabrication and characterization of diamond-like carbon thin films by pulsed laser deposition

Kyung Suk Shim; Sung Min Kim; Sang Hyuck Bae; Sang Yeol Lee; Hae Suk Jung; Hyung Ho Park

doi:10.1016/S0169-4332(99)00401-8

Fabrication and characterization of diamond-like carbon thin films by pulsed laser deposition

Kyung Suk Shim, Sung Min Kim, Sang Hyuck Bae, Sang Yeol Lee, Hae Suk Jung, Hyung Ho Park

Department of Materials Science and Engineering

Research output: Contribution to journal › Conference article › peer-review

16 Citations (Scopus)

Abstract

Diamond-like carbon (DLC) thin films have shown advantageous field emission properties due to a negative electron affinity (NEA) and low work function. The experiment was performed at substrate temperature in the range of room temperature to 600 °C. The laser energy density used was in the range 6-20 J/cm². SEM, Raman, photoluminescence (PL), XPS and I-V measurement were used to investigate the microstructure and the field emission properties of DLC thin films. Deposition parameters, such as laser energy density and substrate temperature were optimized for the application of field emission properties. Good field emission properties were obtained with E_th = 5.03 V/μm at 300 °C and 12 J/cm².

Original language	English
Pages (from-to)	482-484
Number of pages	3
Journal	Applied Surface Science
Volume	154
DOIs	https://doi.org/10.1016/S0169-4332(99)00401-8
Publication status	Published - 2000 Feb 1
Event	The Symposium A on Photo-Excited Processes, Diagnostics and Applications of the 1999 E-MRS Spring Conference (ICPEPA-3) - Strasbourg, France Duration: 1999 Jun 1 → 1999 Jun 4

Bibliographical note

Funding Information:
The authors wish to acknowledge the financial support of the Korea Research Foundation made in the program year of 1997.

All Science Journal Classification (ASJC) codes

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1016/S0169-4332(99)00401-8

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title = "Fabrication and characterization of diamond-like carbon thin films by pulsed laser deposition",

abstract = "Diamond-like carbon (DLC) thin films have shown advantageous field emission properties due to a negative electron affinity (NEA) and low work function. The experiment was performed at substrate temperature in the range of room temperature to 600 °C. The laser energy density used was in the range 6-20 J/cm2. SEM, Raman, photoluminescence (PL), XPS and I-V measurement were used to investigate the microstructure and the field emission properties of DLC thin films. Deposition parameters, such as laser energy density and substrate temperature were optimized for the application of field emission properties. Good field emission properties were obtained with Eth = 5.03 V/μm at 300 °C and 12 J/cm2.",

author = "Shim, {Kyung Suk} and Kim, {Sung Min} and Bae, {Sang Hyuck} and Lee, {Sang Yeol} and Jung, {Hae Suk} and Park, {Hyung Ho}",

note = "Funding Information: The authors wish to acknowledge the financial support of the Korea Research Foundation made in the program year of 1997.; The Symposium A on Photo-Excited Processes, Diagnostics and Applications of the 1999 E-MRS Spring Conference (ICPEPA-3) ; Conference date: 01-06-1999 Through 04-06-1999",

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doi = "10.1016/S0169-4332(99)00401-8",

language = "English",

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journal = "Applied Surface Science",

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TY - JOUR

T1 - Fabrication and characterization of diamond-like carbon thin films by pulsed laser deposition

AU - Shim, Kyung Suk

AU - Kim, Sung Min

AU - Bae, Sang Hyuck

AU - Lee, Sang Yeol

AU - Jung, Hae Suk

AU - Park, Hyung Ho

N1 - Funding Information: The authors wish to acknowledge the financial support of the Korea Research Foundation made in the program year of 1997.

PY - 2000/2/1

Y1 - 2000/2/1

N2 - Diamond-like carbon (DLC) thin films have shown advantageous field emission properties due to a negative electron affinity (NEA) and low work function. The experiment was performed at substrate temperature in the range of room temperature to 600 °C. The laser energy density used was in the range 6-20 J/cm2. SEM, Raman, photoluminescence (PL), XPS and I-V measurement were used to investigate the microstructure and the field emission properties of DLC thin films. Deposition parameters, such as laser energy density and substrate temperature were optimized for the application of field emission properties. Good field emission properties were obtained with Eth = 5.03 V/μm at 300 °C and 12 J/cm2.

AB - Diamond-like carbon (DLC) thin films have shown advantageous field emission properties due to a negative electron affinity (NEA) and low work function. The experiment was performed at substrate temperature in the range of room temperature to 600 °C. The laser energy density used was in the range 6-20 J/cm2. SEM, Raman, photoluminescence (PL), XPS and I-V measurement were used to investigate the microstructure and the field emission properties of DLC thin films. Deposition parameters, such as laser energy density and substrate temperature were optimized for the application of field emission properties. Good field emission properties were obtained with Eth = 5.03 V/μm at 300 °C and 12 J/cm2.

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DO - 10.1016/S0169-4332(99)00401-8

M3 - Conference article

AN - SCOPUS:0033872474

SN - 0169-4332

VL - 154

SP - 482

EP - 484

JO - Applied Surface Science

JF - Applied Surface Science

T2 - The Symposium A on Photo-Excited Processes, Diagnostics and Applications of the 1999 E-MRS Spring Conference (ICPEPA-3)

Y2 - 1 June 1999 through 4 June 1999

ER -

Fabrication and characterization of diamond-like carbon thin films by pulsed laser deposition

Abstract

Bibliographical note

All Science Journal Classification (ASJC) codes

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