Fabrication and characterization of diamond-like carbon thin films by pulsed laser deposition

Kyung Suk Shim, Sung Min Kim, Sang Hyuck Bae, Sang Yeol Lee, Hae Suk Jung, Hyung Ho Park

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16 Citations (Scopus)


Diamond-like carbon (DLC) thin films have shown advantageous field emission properties due to a negative electron affinity (NEA) and low work function. The experiment was performed at substrate temperature in the range of room temperature to 600 °C. The laser energy density used was in the range 6-20 J/cm2. SEM, Raman, photoluminescence (PL), XPS and I-V measurement were used to investigate the microstructure and the field emission properties of DLC thin films. Deposition parameters, such as laser energy density and substrate temperature were optimized for the application of field emission properties. Good field emission properties were obtained with Eth = 5.03 V/μm at 300 °C and 12 J/cm2.

Original languageEnglish
Pages (from-to)482-484
Number of pages3
JournalApplied Surface Science
Publication statusPublished - 2000 Feb 1
EventThe Symposium A on Photo-Excited Processes, Diagnostics and Applications of the 1999 E-MRS Spring Conference (ICPEPA-3) - Strasbourg, France
Duration: 1999 Jun 11999 Jun 4

Bibliographical note

Funding Information:
The authors wish to acknowledge the financial support of the Korea Research Foundation made in the program year of 1997.

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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