Experimental Analysis of Active Species Generated by Atmospheric Plasma

In atmospheric plasma process, some active species, like ozone and hydroxy radical, generate from reaction among nitrogen, oxygen and water vapor etc. For better understanding about generation of active species by atmospheric plasma, OES analyses were carried out in atmospheric pressure in multipoint corona and some DBD types. Our experimental DBD types are volume DBD, surface DBD and coplanar DBD. We compared with the relative intensity of active species from OES data. And we also calculated the intensity ratio of the first negative system of N₂⁺(391.4nm) to the second positive system of N₂(337.1nm) to know which type of plasma generate the electrons with higher energy. And from these results, we concluded the relationship between the intensity of electron energy and generation of active species in each type of the atmospheric plasma.