Evaluation of the chemical states and electrical activation of ultra-highly B-doped Si1-xGex by ion implantation and subsequent nanosecond laser annealing

  • Kiseok Lee
  • , Chunghee Jo
  • , Dongmin Yoon
  • , Seunghyun Baik
  • , Dae Hong Ko

Research output: Contribution to journal › Article › peer-review

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