Evaluation of 3C-SiC nanomechanical resonators using room temperature magnetomotive transduction

Physics

• Evaluation 16%
• Pressure 16%
• Resonant Vibration 16%
• Resonator 100%
• Room Temperature 50%
• Silicon 16%
• Thin Films 16%
• Utilization 16%

Engineering

• Applications 16%
• Evaluation 16%
• Properties 16%
• Prototype 16%
• Quality Factor 16%
• Room Temperature 50%
• Thin Films 16%

Material Science

• Building Material 16%
• Devices 16%
• Thin Films 16%
• Ultrathin Films 16%