Evaluation of 3C-SiC nanomechanical resonators using room temperature magnetomotive transduction

Seong Chan Jun; X. M.Henry Huang; J. Hone; C. A. Zorman; M. Mehregany

doi:10.1109/ICSENS.2005.1597881

Evaluation of 3C-SiC nanomechanical resonators using room temperature magnetomotive transduction

Seong Chan Jun, X. M.Henry Huang, J. Hone, C. A. Zorman, M. Mehregany

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

13 Citations (Scopus)

Abstract

We report our efforts toward using room temperature magnetomotive transduction technique for SiC nanomechanical resonators. The resonators were nanomachined from 30 nm-thick 3C-SiC thin films epitaxially grown on (100) silicon. The structures show mechanical resonance at 10.41 MHz with a quality factor of about 2800. Magnetomotive transduction was used to read out the resonance at room temperature and moderate pressure. This technique has the potential to become an important tool for studying the properties of ultrathin films, as well as developing deployable SiC-based NEMS prototype devices and systems for applications that would benefit from SiC as the structural material.

Original language	English
Title of host publication	Proceedings of the Fourth IEEE Conference on Sensors 2005
Pages	1042-1045
Number of pages	4
DOIs	https://doi.org/10.1109/ICSENS.2005.1597881
Publication status	Published - 2005
Event	Fourth IEEE Conference on Sensors 2005 - Irvine, CA, United States Duration: 2005 Oct 31 → 2005 Nov 3

Publication series

Name	Proceedings of IEEE Sensors
Volume	2005

Other

Other	Fourth IEEE Conference on Sensors 2005
Country/Territory	United States
City	Irvine, CA
Period	05/10/31 → 05/11/3

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Access to Document

10.1109/ICSENS.2005.1597881

Cite this

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title = "Evaluation of 3C-SiC nanomechanical resonators using room temperature magnetomotive transduction",

abstract = "We report our efforts toward using room temperature magnetomotive transduction technique for SiC nanomechanical resonators. The resonators were nanomachined from 30 nm-thick 3C-SiC thin films epitaxially grown on (100) silicon. The structures show mechanical resonance at 10.41 MHz with a quality factor of about 2800. Magnetomotive transduction was used to read out the resonance at room temperature and moderate pressure. This technique has the potential to become an important tool for studying the properties of ultrathin films, as well as developing deployable SiC-based NEMS prototype devices and systems for applications that would benefit from SiC as the structural material.",

author = "Jun, {Seong Chan} and Huang, {X. M.Henry} and J. Hone and Zorman, {C. A.} and M. Mehregany",

year = "2005",

doi = "10.1109/ICSENS.2005.1597881",

language = "English",

isbn = "0780390563",

series = "Proceedings of IEEE Sensors",

pages = "1042--1045",

booktitle = "Proceedings of the Fourth IEEE Conference on Sensors 2005",

note = "Fourth IEEE Conference on Sensors 2005 ; Conference date: 31-10-2005 Through 03-11-2005",

}

Jun, SC, Huang, XMH, Hone, J, Zorman, CA & Mehregany, M 2005, Evaluation of 3C-SiC nanomechanical resonators using room temperature magnetomotive transduction. in Proceedings of the Fourth IEEE Conference on Sensors 2005., 1597881, Proceedings of IEEE Sensors, vol. 2005, pp. 1042-1045, Fourth IEEE Conference on Sensors 2005, Irvine, CA, United States, 05/10/31. https://doi.org/10.1109/ICSENS.2005.1597881

TY - GEN

T1 - Evaluation of 3C-SiC nanomechanical resonators using room temperature magnetomotive transduction

AU - Jun, Seong Chan

AU - Huang, X. M.Henry

AU - Hone, J.

AU - Zorman, C. A.

AU - Mehregany, M.

PY - 2005

Y1 - 2005

N2 - We report our efforts toward using room temperature magnetomotive transduction technique for SiC nanomechanical resonators. The resonators were nanomachined from 30 nm-thick 3C-SiC thin films epitaxially grown on (100) silicon. The structures show mechanical resonance at 10.41 MHz with a quality factor of about 2800. Magnetomotive transduction was used to read out the resonance at room temperature and moderate pressure. This technique has the potential to become an important tool for studying the properties of ultrathin films, as well as developing deployable SiC-based NEMS prototype devices and systems for applications that would benefit from SiC as the structural material.

AB - We report our efforts toward using room temperature magnetomotive transduction technique for SiC nanomechanical resonators. The resonators were nanomachined from 30 nm-thick 3C-SiC thin films epitaxially grown on (100) silicon. The structures show mechanical resonance at 10.41 MHz with a quality factor of about 2800. Magnetomotive transduction was used to read out the resonance at room temperature and moderate pressure. This technique has the potential to become an important tool for studying the properties of ultrathin films, as well as developing deployable SiC-based NEMS prototype devices and systems for applications that would benefit from SiC as the structural material.

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M3 - Conference contribution

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SN - 0780390563

SN - 9780780390560

T3 - Proceedings of IEEE Sensors

SP - 1042

EP - 1045

BT - Proceedings of the Fourth IEEE Conference on Sensors 2005

T2 - Fourth IEEE Conference on Sensors 2005

Y2 - 31 October 2005 through 3 November 2005

ER -

Evaluation of 3C-SiC nanomechanical resonators using room temperature magnetomotive transduction

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