Heteroepitaxial Y2O3 films were grown on Si(100) substrates by the technique of reactive ionized cluster beam deposition. The crystallinity of the films was investigated with reflection high energy electron diffraction (RHEED), glancing angle x-ray diffraction (GXRD), and the interface was examined by high resolution transmission electron microscopy (HRTEM). Under the condition of 5 kV acceleration voltage at the substrate temperature of 800 °C, the Y2O3 film grows epitaxially on the Si(100) substrate. RHEED and GXRD results revealed that the epitaxial relationship between Y2O3 and Si(100) is Y2O3(110)//Si(100), and HRTEM observation showed a sharp interface without an amorphous layer.
|Number of pages||3|
|Journal||Applied Physics Letters|
|Publication status||Published - 1997 Aug 18|
Bibliographical noteFunding Information:
Zymo Research Corporation, Irvine, CA provided their kits as well as its 16S sequencing service for use in this study. S.K.F. were supported by the German Research Foundation (DFG, Renoprotection CRC1365).
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)