Epitaxial growth of CoSi2 in a decanano contact opening on a (100) silicon substrate

Ho Jung Sun, Young Jin Lee, Soo Hyun Kim, Joo Wan Lee, Ja Chun Ku, Hyun Chul Sohn, Jin Woong Kim, Uisik Kim, Nak Kyun Sung

Research output: Contribution to journal › Article › peer-review

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