Enhanced air-gap control for high-speed plasmonic lithography

Hyunwoo Hwang; Won Sup Lee; No Cheol Park; Young Pil Park; Kyoung Su Park; Hyunseok Yang

Enhanced air-gap control for high-speed plasmonic lithography

Hyunwoo Hwang, Won Sup Lee, No Cheol Park, Young Pil Park, Kyoung Su Park, Hyunseok Yang

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011
Pages	927-928
Number of pages	2
Publication status	Published - 2011
Event	ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011 - Denver, CO, United States Duration: 2011 Nov 11 → 2011 Nov 17

Publication series

Name	ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011
Volume	1

Other

Other	ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011
Country/Territory	United States
City	Denver, CO
Period	11/11/11 → 11/11/17

All Science Journal Classification (ASJC) codes

Mechanical Engineering

Cite this

@inproceedings{506ab52a983e44e69ff8e07526b44c72,

title = "Enhanced air-gap control for high-speed plasmonic lithography",

author = "Hyunwoo Hwang and Lee, {Won Sup} and Park, {No Cheol} and Park, {Young Pil} and Park, {Kyoung Su} and Hyunseok Yang",

year = "2011",

language = "English",

isbn = "9780791854877",

series = "ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011",

pages = "927--928",

booktitle = "ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011",

note = "ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011 ; Conference date: 11-11-2011 Through 17-11-2011",

}

Hwang, H, Lee, WS, Park, NC, Park, YP, Park, KS & Yang, H 2011, Enhanced air-gap control for high-speed plasmonic lithography. in ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011. ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011, vol. 1, pp. 927-928, ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011, Denver, CO, United States, 11/11/11.

Enhanced air-gap control for high-speed plasmonic lithography. / Hwang, Hyunwoo; Lee, Won Sup; Park, No Cheol et al.
ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011. 2011. p. 927-928 (ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Enhanced air-gap control for high-speed plasmonic lithography

AU - Hwang, Hyunwoo

AU - Lee, Won Sup

AU - Park, No Cheol

AU - Park, Young Pil

AU - Park, Kyoung Su

AU - Yang, Hyunseok

PY - 2011

Y1 - 2011

UR - http://www.scopus.com/inward/record.url?scp=84869192552&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84869192552&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84869192552

SN - 9780791854877

T3 - ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011

SP - 927

EP - 928

BT - ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011

T2 - ASME 2011 International Mechanical Engineering Congress and Exposition, IMECE 2011

Y2 - 11 November 2011 through 17 November 2011

ER -

Enhanced air-gap control for high-speed plasmonic lithography

Publication series

Other

All Science Journal Classification (ASJC) codes

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Cite this