Abstract
Electrothermal tuning of nanomechanical silicon carbide resonators has been demonstrated. The detected mechanical resonance of the untuned resonator was 10.12MHz and has a quality factor of about 2000 as measured using the magnetomotive transduction technique. Also, the resonance frequency was tuned by 10 with Joule heating of DC current.
Original language | English |
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Pages (from-to) | 1484-1485 |
Number of pages | 2 |
Journal | Electronics Letters |
Volume | 42 |
Issue number | 25 |
DOIs | |
Publication status | Published - 2006 |
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering