Abstract
We have proposed an electrostatic digital micromirror utilizing interdigitated cantilevers. The electrostatically-actuated microstructure has been fabricated by the electroplated-nickel surface micromachining. Thanks to the unique design of the interdigitated cantilevers, the micromirror has an operational mechanism of a seesaw allowing accurate, reliable control of the final rotating angle. The fabricated digital micromirror has shown the rotating angle of ±9 degrees with an actuation voltage of 60 V.
| Original language | English |
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| Pages | 528-531 |
| Number of pages | 4 |
| Publication status | Published - 2002 |
| Event | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States Duration: 2002 Jan 20 → 2002 Jan 24 |
Conference
| Conference | 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 |
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| Country/Territory | United States |
| City | Las Vegas, NV |
| Period | 02/1/20 → 02/1/24 |
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering