TY - JOUR
T1 - Electron cyclotron resonance (ECR) sputtered antireflection coatings on laser facets for optical memory applications
AU - Kim, Young Joo
AU - Tateno, Ryo
AU - Ikura, Tomowo
AU - Matsuda, Keita
AU - Kawai, Hideki
AU - Suzuki, Masahiko
AU - Goto, Kenya
PY - 1998/4
Y1 - 1998/4
N2 - Antireflection (AR) layer coated semiconductor laser diodes may have many applications, particularly as external cavity diodes tor optical memory heads. The electron cyclotron resonance (ECR) sputtering system was used for preparing AR coatings which consist of both SiO2 and Si3N4 phases. The refractive index and the thickness of the AR coatings were adjusted by controlling numerous deposition parameters, including the relative flow ratio of O2 and N2 gas flow, the total gas flow rate, the RF and ECR power, and the deposition time. AR coated AlGaAs laser diodes do not show a sharp threshold in the light output-current characteristic curve and have good potential for application in the lensless optical floppy systems.
AB - Antireflection (AR) layer coated semiconductor laser diodes may have many applications, particularly as external cavity diodes tor optical memory heads. The electron cyclotron resonance (ECR) sputtering system was used for preparing AR coatings which consist of both SiO2 and Si3N4 phases. The refractive index and the thickness of the AR coatings were adjusted by controlling numerous deposition parameters, including the relative flow ratio of O2 and N2 gas flow, the total gas flow rate, the RF and ECR power, and the deposition time. AR coated AlGaAs laser diodes do not show a sharp threshold in the light output-current characteristic curve and have good potential for application in the lensless optical floppy systems.
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U2 - 10.1143/jjap.37.2201
DO - 10.1143/jjap.37.2201
M3 - Article
AN - SCOPUS:0032045972
SN - 0021-4922
VL - 37
SP - 2201
EP - 2202
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 4 SUPPL. B
ER -