Electrochemical local etching of silicon in etchant vapor

Bugeun Ki, Keorock Choi, Kyunghwan Kim, Jungwoo Oh

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Electrochemical local etching of silicon in etchant vapor'. Together they form a unique fingerprint.

Material Science